Effects of deposition temperature and pressure of the surface roughness and the grain size of polycrystalline Si1-xGex films

Journal of Materials Science

Volumn 35, Issue 19, 2000, Pages 4789-4794

  Lee, S H ^a   So, M G ^a  

^a Kangwon National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; GRAIN SIZE AND SHAPE; POLYCRYSTALLINE MATERIALS; SUPERCONDUCTING TRANSITION TEMPERATURE; SURFACE ROUGHNESS;

DEPOSITION TEMPERATURES;

SEMICONDUCTING FILMS;

EID: 0034299236     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1004868627888     Document Type: Article

References (16)

1. T. J. KING, J. R. PFIESTER and K. C . SARASWAT, IEEE Electron Devices Lett. EDL-12 (1991) 533.
2. T. J. KING and K. C. SARASWAT, in International Electron Devices Meeting, Tech. Dig. (1991) 567.
3. T. J. KING and K. C. SARASWAT, Idem., IEEE Electron Device 41(2) (1994) 228.
4. J. A. TASI, A. J. TANG and R. RIEF, Mat. Res. Soc. Symp. Proc. 343 (1994) 679.
5. T. J. KING and K. C. SARASWAT, IEEE Electron Devices 41(9) (1994) 1581.
6. H. C. LIN, H. Y. LIN, C. Y. CHANG, T. F. LEI, P. T. WANG, R. C. DENG, J. LIN and C. Y. CHAO, J. Appl. Phys. 74 (1993) 5395.
7. J. A. TSAI, A. J. TANG, T. NOGUCHI and R. RIEF, J. Electrochem. Soc. 142(9) (1995) 3220.
8. N. MATSUO, H. FUJIWARA, T. MIYOSHI and T. KOYANAGI, IEEE Elecrton Device Letters 17(2) (1996) 56.
9. H. UCHIDA, K. TAKECHI, S. NISHIDA and S. KANEKO, Jap. J. of Appl. Phys. 30(12B) (1991) 3691.
10. C. Y. CHANG, H. Y. LIN, T. F. LEI, J. Y. CHENG, L. P. CHEN and B. T. DAI, IEEE Elecrton Device Letters 17(3) (1996) 100.
11. K. E. VIOLETTE, M. C. ZTURK, K. N. CHRISTENSEN and D. M. MAHER, J. Electrochem. Soc. 143(2) (1996) 649.
12. M. CAO, A. WANG and K. C. SARASWAT, J. Electrochem. Soc. ibid. 142(5) (1995) 1566.
13. T. J. KING and K. C. SARASWAT, J. Electrochem. Soc. ibid. 141(8) (1994) 2235.
14. H. C. LIN, C. Y. CHANG, W. H. CHEN, W. C. TSAI, T. C. CHANG, T. G. JUNG and H. Y. LIN, J. Electrochem. Soc. ibid. 141(9) (1994) 2559.
15. J. BLOEM, J. Cryst. Growth 50 (1980) 581.
16. T. I. KAMINS, in "Polycrystalline Silicon for Integrated CircuitApplications," edited by J. Allen (Kluwer Academic Publishers, Norwell, MA, 1988). The Kluwer International Series in Engineering and Computer Science.