Structural and transport properties of nanocrystalline silicon thin films prepared at 54.24 MHz plasma excitation frequency

Journal of Crystal Growth

Volumn 304, Issue 2, 2007, Pages 352-360

  Chowdhury, Amartya ^a   Mukhopadhyay, Sumita ^a   Ray, Swati ^a  

^a DEPARTMENT OF MATERIALS SCIENCE   (India)

Author keywords

A1. Nanostructures; A3. Chemical vapour deposition process; B2. Semiconducting silicon

Indexed keywords

GRAIN SIZE AND SHAPE; NANOCRYSTALLINE SILICON; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON; TRANSPORT PROPERTIES;

CHAMBER PRESSURE; HYDROGEN DILUTION; PLASMA EXCITATION FREQUENCY;

THIN FILMS;

EID: 34248591429     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2007.02.041     Document Type: Article

References (33)

1. Heintze M., Zedlitz R., and Bauer G.H. J. Phys. D 26 (1993) 1781
2. Takagi T., Ueda M., Ito N., Watabe Y., Sato H., and Sawaya K. Thin Solid Films 502 (2006) 50
3. Krol U., Fischer D., Meier J., Sansonnens L., Hawlity A., and Shah A. Mater. Res. Soc. Symp. Proc. 557 (1999) 121
4. Fukawa M., Suzuki S., Guo L., Kondo M., and Matsuda A. Sol. Energy Mater. Sol. Cells 66 (2001) 217
5. Rath J.K., Franken R.H.J., Gordijn A., Schropp R.E.I., and Goedheer W.J. J. Non-Cryst. Solids 338-340 (2004) 56
6. Amanatides E., Hammad A., Katsia E., and Mataras D. J. Appl. Phys. 97 (2005) 073303
7. Amanatides E., Mataras D., and Rapakoulias D.E. Thin Solid Films 383 (2001) 15
8. Mai Y., Klein S., Carius R., Wolff J., Lambertz A., Finger F., and Geng X. J. Appl. Phys. 97 (2005) 114913
9. Klein S., Finger F., Carius R., and Lassen J. Thin Solid Films 501 (2006) 43
10. Matsui T., Matsuda A., and Kondo M. Sol. Energy Mater. Sol. Cells 90 (2006) 3199
11. Kakinuma H., Mohri M., Sakamoto M., and Tsuruoka T. J. Appl. Phys. 70 12 (1991) 127374
12. Houben L., Carius R., Lundszien D., Folsch J., Finger F., Luysberg M., and Wagner H. Philos. Mag. A 77 6 (1998) 1447
13. Veprek S., Sarott F.A., and Iqbal Z. Phys. Rev. B 36 (1987) 3344
14. Chaabane N., Cabarrocas P.R.i., and Vach H. J. Non-Cryst. Solids 338-340 (2004) 51
15. Ray S., Mukhopadhyay S., and Jana T. Sol. Energy Mater. Sol. Cells 90 (2006) 631
16. Das C., Jana T., and Ray S. Jpn. J. Appl. Phys. 43 (2004) 3269
17. Hazra S., Saha S.C., and Ray S. J. Phys. D 32 (1999) 208
18. Brodsky M.H., Cardona M., and Cuomo J.J. Phy. Rev. B 16 (1977) 3556
19. Quicker D., and Kakalios J. Phys. Rev. B 60 (1999) 2449
20. Shanks H., Fang C.J., Ley L., Cardona M., Demond F.J., and Kalbitzer S. Phys. Stat. Sol. B 100 (1980) 43
21. Mukhopadhyay S., Das C., and Ray S. J. Phys. D 37 (2004) 1736
22. Ritter D., Zeldov E., and Weilson K. Appl. Phys. Lett. 49 (1986) 791
23. Rath J.K. Sol. Energy Mater. Sol. Cells 76 (2003) 431
24. Lebib S., and Cabarrocas P.R.i. J. Appl. Phys. 97 (2005) 104334
25. Kaneko T., Wakagi M., Onisawa K.I., and Minemura T. Appl. Phys. Lett. 64 (1994) 1865
26. S. Guha, J. Yang, in: 15th International Photovoltaic Science & Engineering Conference (PVSEC-15), 2005, p. 35.
27. Niikura C., Brenot R., Guillet J., Bouree J.E., Kleider J.P., Bruggemann R., and Longeaud C. Sol. Energy Mater. Sol. Cells 66 (2001) 421
28. Matsui T., Tsukiji M., Saika H., Toyama T., and Okamoto H. Jpn. J. Appl. Phys. 41 (2002) 20
29. Mahan A.H. Sol. Energy Mater. Sol. Cells 78 (2003) 299
30. Shah A.V., Meier J., Vallat-Sauvain E., Wyrsch N., Kroll U., Droz C., and Graf U. Sol. Energy Mater. Sol. Cells 78 (2003) 469
31. Jackson W.B., and Tsai C.C. Phys. Rev. B 45 (1992) 6564
32. Von Keudell A., and Abelson J.R. J. Appl. Phys. 84 (1998) 489
33. Staebler D.L., and Wronski C.R. Appl. Phys. Lett. 31 (1977) 292