Effect of the deposition temperature on the properties of iridium thin films grown by means of pulsed laser deposition

Journal of Materials Research

Volumn 14, Issue 8, 1999, Pages 3241-3246

  El Khakani, M A ^a   Le Drogoff, B ^a   Chaker, M ^a  

^a INRS EMT   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; DEPOSITION; EXCIMER LASERS; FILM GROWTH; GRAIN SIZE AND SHAPE; LASER ABLATION; POLYCRYSTALLINE MATERIALS; PULSED LASER APPLICATIONS; SURFACE ROUGHNESS; THERMAL EFFECTS; THIN FILMS;

PULSED LASER DEPOSITION;

IRIDIUM;

EID: 0032660975     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.1999.0438     Document Type: Article

References (24)

1. K. Mumtaz, J. Echigoya, T. Hirai, and Y. Shindo, Mater. Sci. Eng. A 167, 187 (1993).
2. T. Gerfin, W.J. Hälg, F. Atamny, and K-H. Dahmen, Thin Solid Films 241, 352 (1993).
3. G.T.A. Kovacs, C.W. Storment, and S.P. Kounaves, Sens. Actuators B 23, 41 (1995).
4. P.R.M. Silva, M.A. El Khakani, M. Chaker, G.Y. Champagne, J. Chevalet, L. Gastonguay, R. Lacasse, and M. Ladouceur, Anal. Chim. Acta. 385, 249 (1999).
5. Solubility Data Series - Metals in Mercury, edited by C. Hirayama, Z. Galus, and C. Guminski. (Pergamon Press, Oxford, U.K., 1986), Vol. 25.
6. M.A. El Khakani, M. Chaker, and B. Le Drogoff, J. Vac. Sci. Technol. A 16, 885 (1998).
7. G.M. Mikhailov, I.V. Malikov, A.V. Chernykh, and V.T. Petrashov, Thin Solid Films 293, 315 (1997).
8. M.A. El Khakani, E. Gat, Y. Beaudoin, M. Chaker, C. Monteil, D. Guay, G. Létourneau, and H. Pépin, Proc. SPIE-Int. Soc. Opt. Eng. 2403, 153 (1995).
9. Q.X. Jia, S.G. Song, S.R. Foltyn, and X.D. Wu, J. Mater. Res. 10, 2401 (1995).
10. M.A. El Khakani, M. Chaker, and E. Gat, Appl. Phys. Lett. 69, 2027 (1996).
11. Pulsed Laser Deposition of Thin Films, edited by D.B. Chrisey and G.K. Hubler (John Wiley & Sons, Inc., New York, 1994).
12. M.A. El Khakani, M. Chaker, A. Jean, S. Boily, H. Pépin, J.C. Kieffer, and S.C. Gujrathi, J. Appl. Phys. 74, 2834 (1993).
13. H.W. Bergmann, K. Schutte, E. Schubert, and A. Emmel, App. Surf. Sci. 86, 259 (1995).
14. Y. Hiroshima, T. Ishiguro, I. Urata, H. Makita, H. Ohta, M. Tohogi, and Y. Ichinose, J. Appl. Phys. 79, 3572 (1996).
15. Powder Diffraction File, Card No. 06-0598, International Center for Diffraction Data, Swarthmore, PA (1995).
16. H.N. Al-Shareef, K.D. Gifford, S.H. Rou, P.D. Hren, O. Auciello, and A.I. Kingon, Intergrat. Ferroelect. 3, 321 (1993).
17. N.V. Gelfond, F.V. Tuzikov, and I.K. Igumenov, Thin Solid Films 227, 144 (1993).
18. Encyclopedia of Materials Science and Engineering, edited by M.B. Bever (Pergamon Press, Oxford, U.K., 1986), Vol. 5, p. 3577.
19. Metals Handbook, 10th ed., edited by J.R. Davis et al. (ASM International, Materials Park, OH, 1990), Vol. 2, p. 1117.
20. K.E. Peterson, Proc. IEEE 70, 420 (1982).
21. E. Selbach, H. Jacques, K. Eiermann, B. Lengeler, and W. Schilling, Thin Solid Films 149, 17 (1987).
22. A.F. Mayadas and M. Shatzkes, Phys. Rev. B 1, 1382 (1970).
23. L. Krusin-Elbaum, Thin Solid Films 169, 17 (1989).
24. G.K. Reeves, M.W. Lwan, and R.G. Elliman, J. Vac. Sci. Technol. A 10, 3203 (1992).