A computer simulation of nucleation and growth of thin films

Computational Materials Science

Volumn 30, Issue 3-4 SPEC. ISS., 2004, Pages 331-336

  Zhang, Peifeng ^a   Zheng, Xiaoping ^a   Wu, Suoping ^a   He, Deyan ^a  

^a LANZHOU UNIVERSITY   (China)

Author keywords

Kinetic Monte Carlo simulations; Nucleation; Relative film density; Surface roughness; Thin film growth

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; FILM GROWTH; MONTE CARLO METHODS; NUCLEATION; SURFACE ROUGHNESS;

ATOM DETACHMENT; RELATIVE FILM DENSITY; SURFACE ATOM DIFFUSION; THIN FILM GROWTH;

THIN FILMS;

EID: 3142687609     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.commatsci.2004.02.023     Document Type: Conference Paper

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