Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: Measurement and analysis

Applied Optics

Volumn 49, Issue 9, 2010, Pages 1503-1512

  Schröder, Sven ^a   Herffurth, Tobias ^a   Trost, Marcus ^a   Duparré, Angela ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; EXTREME ULTRAVIOLET LITHOGRAPHY; LIGHT SCATTERING; REFLECTION; SUBSTRATES;

ANGLE RESOLVED SCATTERING; APPROXIMATE MODEL; EXTREME ULTRAVIOLET MULTILAYERS; EXTREME ULTRAVIOLETS; MEASUREMENT AND ANALYSIS; OPTICAL COMPONENTS; SMOOTHING EFFECTS; STAND-ALONE INSTRUMENTS;

MULTILAYERS;

EID: 77949782356     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.49.001503     Document Type: Article

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