Novel compact spectrophotometer for EUV-optics characterization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6317, Issue , 2006, Pages

  Starke, K ^a   Blaschke, H ^a   Jensen, L ^a   Nevas, S ^a   Ristau, D ^a   Lebert, R ^b   Wies, C ^b   Bayer, A ^c   Barkusky, F ^c   Mann, K ^c  

^a LASER ZENTRUM HANNOVER E V   (Germany)

^b AIXUV GmbH   (Germany)

^c LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

Compact EUV spectrophotometer; EUV optics metrology; EUV reflectometer

Indexed keywords

OPTICAL PROPERTIES; RADIATION EFFECTS; REFLECTION; SYNCHROTRON RADIATION;

COMPACT EUV-SPECTROPHOTOMETER; EUV-OPTICS METROLOGY; EUV-REFLECTOMETER;

SPECTROPHOTOMETERS;

EID: 33750588325     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.686878     Document Type: Conference Paper

References (8)

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