Nonspecular x-ray scattering in a multilayer-coated imaging system

Journal of Applied Physics

Volumn 84, Issue 2, 1998, Pages 1003-1028

  Stearns, D G ^a,c   Gaines, D P ^a,d   Sweeney, D W ^a   Gullikson, E M ^b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c OS Associates   (United States)

^d Ultratech Stepper Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 56249127529     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368098     Document Type: Article

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