Metrology capabilities and performance of the new DUV Scatterometer of the PTB

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6533, Issue , 2007, Pages

  Wurm, Matthias ^a   Bodermann, Bernd ^a   Pilarski, Frank ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

At wavelength metrology; CD; Diffractometry; Edge profile; Ellipsometry; Inverse diffraction problem; Pitch; Polarisation; Reflectometry; Scatterometry

Indexed keywords

DIFFRACTION; ELECTROMAGNETIC WAVE SCATTERING; POLARIZATION; SENSITIVITY ANALYSIS; SURFACES; WAVELENGTH;

EDGE PROFILE; INVERSE DIFFRACTION PROBLEM; SCATTEROMETRY; WAVELENGTH METROLOGY;

MASKS;

EID: 35648988908     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.736968     Document Type: Conference Paper

References (2)

1. http://www.wias-berlin.de/software/DIPOG/index.html.de
2. H. Groß, R. Model, M. Bär, M. Wurm, B. Bodermann, A. Rathsfeld: »Mathematical modelling of indirect measurements in scatterometry«, Measurement 39, IMEKO (2006)