Sensitive and flexible light scatter techniques from the VUV to IR regions

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5965, Issue , 2005, Pages

  Schröder, Sven ^a   Gliech, Stefan ^a   Duparré, Angela ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Angle resolved scatter; Diamond turned mirrors; Scattering; Surfaces; Thin films; Total scatter

Indexed keywords

MIRRORS; OPTICAL SYSTEMS; SENSITIVITY ANALYSIS; SURFACE ROUGHNESS; SURFACES; THIN FILMS;

ANGLE RESOLVED SCATTER; DIAMOND-TURNED MIRRORS; ROUGHNESS ANALYSIS; TOTAL SCATTER;

LIGHT SCATTERING;

EID: 33244488732     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.625780     Document Type: Conference Paper

References (13)

1. ISO 13696:2002. "Optics and optical instruments - Test methods for radiation scattered by optical components," International Organization for Standardization (2002)
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3. J. C. Stover, "Optical Scattering- Measurement and Analysis" 2nd Edition. SPIE- Press, Bellingham, Washington (1995)
4. S. Gliech, A. Duparré, "Light Scatter Technique for Application in Optics, Nanotechnology, and Engineering", VDI-Berichte Nr. 1844: International Symposium on Photonics in Measurement, Frankfurt, (2004)
5. S. Gliech, S. Schröder, A. Duparré, "High-sensitivity light scattering measurement of optical coating components", Optical Interference Coatings, Lecture and Poster: Optical Interference Coatings, Tucson, (2004)
6. S. Schröder, S. Gliech, and A. Duparré, "Measurement system to determine the total and angle resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions", Appl. Opt., (2005 in print)
7. S. Schröder, M. Kamprath, and A. Duparré, "Scatter analysis of optical components from 193 nm to 13.5 nm", to be published in Proc. SPIE 5878 (2005)
8. A. Duparré, J. Ferre-Borrull, S. Gliech, G. Notni, J. Steinert, J. M. Bennett, "Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components", Appl. Opt. 41, 154-171 (2002)
9. J. M. Elson, J. P. Rahn, J. M. Bennett, "Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation length, and roughness cross-correlation properties", Appl. Opt. 22, 3207-3219 (1983)
10. J. M. Elson, J. P. Rahn, J. M. Bennett, "Light scattering from multilayer optics: comparison of theory and experiment", Appl. Opt. 19, 669-679 ( 1980)
11. P. Bousquet, F. Flory, P. Roche, "Scattering from multilayer thin films: theory and experiment", JOSA 71, 1115-1123 (1981)
12. S. Schröder, H. Uhlig, A. Duparré, N. Kaiser, "Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components", to be published in Proc. SPIE 5963 (2005)
13. F. v. Hulst, P. Geelen, A. Gebhardt, R. Steinkopf, "Diamantwerkzeuge für die Fertigung von mikrooptischen Bauelementen", Industrie Diamanten Rundschau 39 (2005)