Goniometric optical scatter instrument for out-of-plane ellipsometry measurements

Review of Scientific Instruments

Volumn 70, Issue 9, 1999, Pages 3688-3695

  Germer, Thomas A ^a   Asmail, Clara C ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001701356     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149950     Document Type: Article

References (30)

1. J. C. Stover, Optical Scattering: Measurement and Analysis (SPIE, Bellingham, WA, 1995).
2. F. E. Nicodemus, J. C. Richmond, J. J. Hsia, I. W. Ginsberg, and T. Limperis, NBS Monograph 160 (National Bureau of Standards, Gaithersburg, MD 1977).
3. E. R. Méndez, A. G. Navarrete, and R. E. Luna, J. Opt. Soc. Am. A 12, 2507 (1995).
4. D. L. Jordan, G. D. Lewis, and E. Jakeman, Appl. Opt. 35, 3583 (1996).
5. S.-M. F. Nee, Appl. Opt. 35, 3570 (1996).
6. T. A. Germer, Appl. Opt. 36, 8798 (1997).
7. T. A. Germer, C. C. Asmail, and B. W. Scheer, Opt. Lett. 22, 1284 (1997).
8. R. E. Luna, Opt. Lett. 21, 1418 (1996).
9. W. S. Bickel, R. R. Zito, and V. Iafelice, J. Appl. Phys. 61, 5392 (1987).
10. V. J. Iafelice and W. S. Bickel, Appl. Opt. 26, 2410 (1987).
11. G. Videen, J.-Y. Hsu, W. S. Bickel, and W. L. Wolfe, J. Opt. Soc. Am. A 9, 1111 (1992).
12. E. Bahar and M. A. Fitzwater, J. Opt. Soc. Am. A 2, 2295 (1985).
13. T. F. Schiff, M. W. Knighton, D. J. Wilson, F. M. Cady, J. C. Stover, and J. J. Butler, Proc. SPIE 1995, 121 (1995).
14. C. C. Asmail, C. L. Cromer, J. E. Proctor, and J. J. Hsia, Proc. SPIE 2260, 52 (1994).
15. T. A. Germer and C. C. Asmail, Proc. SPIE 3141, 220 (1997).
16. C. Asmail, J. Hsia, A. Parr, and J. Hoeft, Appl. Opt. 33, 6084 (1994).
17. T. A. Germer and C. C. Asmail, J. Opt. Soc. Am. A 16, 1326 (1999).
18. T. A. Germer and C. C. Asmail, Proc. SPIE 3121, 173 (1997).
19. D. H. Goldstein and R. A. Chipman, J. Opt. Soc. Am. A 7, 693 (1990).
20. R. M. A. Azzam, Opt. Lett. 2, 148 (1978).
21. R. A. Chipman, in Handbook of Optics, edited by M. Bass (McGraw-Hill, New York, 1995), Vol. II, pp. 22.1-37.
22. S.-Y. Lu and R. A. Chipman, J. Opt. Soc. Am. A 11, 766 (1994).
23. V. N. Kurashov, V. V. Marenko, and T. V. Molebnaya, Opt. Spektrosk. 71, 998 (1991).
24. P. F. Steeger and A. F. Fercher, Opt. Acta 29, 1395 (1982).
25. A. R. Fercher and P. F. Steeger, Opt. Acta 28, 443 (1981).
26. V. N. Kurashov, V. V. Marenko, and T. V. Molebnaya, Opt. Spektrosk. 70, 401 (1992).
27. P. F. Steeger, T. Asakura, K. Zocha, and A. F. Fercher, J. Opt. Soc. Am. A 1, 677 (1984).
28. S. O. Rice, Commun. Pure Appl. Math. 4, 351 (1951).
29. D. E. Barrick, Radar Cross Section Handbook (Plenum, New York, 1970).
30. T. A. Germer and B. W. Scheer, Proc. SPIE 3426, 160 (1998).