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From light scattering to the microstructure of thin film multilayers
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Theory of light scattering from rough surfaces and interfaces and from volume inhomogeneities in an optical layer stack
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Microstructure characterization by angle-resolved scatter and comparison to measurements made by other techniques
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0028367822
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Light scattering from multilayer optics. Part A: Investigation tools
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C. Amra, "Light scattering from multilayer optics. Part A: Investigation tools," J. Opt. Soc. Am. A 11, 197-210 (1994).
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Light scattering from multilayer optics. Part B: Application to experiment
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C. Amra, "Light scattering from multilayer optics. Part B: Application to experiment," J. Opt. Soc. Am. A 11, 211-226 (1994).
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Amra, C.1
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The role of interface correlation in light scattering by a multilayer
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C. Amra, J. H. Apfel, E. Pelletier, "The role of interface correlation in light scattering by a multilayer," Appl. Opt. 31, 3134-3151 (1992).
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Amra, C.1
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8
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0027543540
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First order vector theory of bulk scattering in optical multilayers
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C. Amra, "First order vector theory of bulk scattering in optical multilayers," J. Opt. Soc. Am. A 10, 365-374 (1993).
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Amra, C.1
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84975605156
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Light scattering from the volume of optical thin films: Theory and experiment
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S. Kassam, A. Duparré, K. Hehl, P. Bussemer, and J. Neubert, "Light scattering from the volume of optical thin films: theory and experiment," Appl. Opt. 31, 1304-1313 (1992).
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10
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0004533803
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Numerical study of scattering from rough inhomogeneous films
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H. Giovannini, M. Saillard, A. Sentenac, "Numerical study of scattering from rough inhomogeneous films," J. Opt. Soc. Am. A 15, 1182-1190 (1998).
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Giovannini, H.1
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84975625419
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Polarized light scattered from rough surfaces
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G. Videen, J-Y Hsu, WS. Bickel, WL. Wolfe, "Polarized light scattered from rough surfaces," J. Opt. Soc. Am A9, 1111-1118 (1992).
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12
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0001701356
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Goniometric optical scatter instrument for out-of-plane ellipsometry measurements
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Germer T.A. and Asmail C. C., "Goniometric optical scatter instrument for out-of-plane ellipsometry measurements," Review of scientific Instruments 70, 3688-3695 (1999).
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0035504008
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Determination of the phase of the diffracted field in the optical domain. Application to the reconstruction of surface profiles
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N. Destouches, M. Lequime and H. Giovannini and C.A. Guerin, "Determination of the phase of the diffracted field in the optical domain. Application to the reconstruction of surface profiles," Opt. Comm. 198, 233-239 (2001).
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Destouches, N.1
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14
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0030269610
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Ellipsometry of light scattering from multilayer coatings
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C. Deumié, H. Giovannini and C. Amra, "Ellipsometry of light scattering from multilayer coatings," Appl. Opt. 35, 5600-5608 (1996).
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Appl. Opt.
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Deumié, C.1
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15
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0036602891
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Angle-resolved ellipsometry of light scattering: Discrimination of surface and bulk effects in substrates and optical coatings
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C. Deumié, H. Giovannini and C. Amra, "Angle-resolved ellipsometry of light scattering: discrimination of surface and bulk effects in substrates and optical coatings," Appl. Opt. 41, 3362-3369 (2002).
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Deumié, C.1
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16
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0027677462
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Multiwavelength (0.45-10.6 μm) angle-resolved scatterometer or how to extend the optical window
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C. Amra, D. Torricini and P. Roche, "Multiwavelength (0.45-10.6 μm) angle-resolved scatterometer or how to extend the optical window," Appl. Opt. 32, 5462-5474 (1993).
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Appl. Opt.
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Amra, C.1
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17
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0027677835
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Comparison of surface and bulk scattering in optical multilayers
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C. Amra, C. Grèzes-Besset, and L. Bruel, "Comparison of surface and bulk scattering in optical multilayers," Appl. Opt. 32, 5492-5503 (1993).
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Amra, C.1
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18
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84971961740
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Boundary integral equations for the scattering of electromagnetic waves by a homogeneous dielectric obstacle
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P. A. Martin and P. Ola, "Boundary integral equations for the scattering of electromagnetic waves by a homogeneous dielectric obstacle," Proc. Roy. Soc. Edinburgh, 123A, 185-208 (1993).
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19
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Rigorous solution for electromagnetic scattering from rough surfaces
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M. Saillard and A. Sentenac, "Rigorous solution for electromagnetic scattering from rough surfaces," Waves in Random Media 11, 103-137 (2001).
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0000376445
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Comparison of Si surface roughness measured by atomic force microscopy and ellipsometry
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Fang S. J., Chen W., Yamanaka T., and Helms C. R, "Comparison of Si surface roughness measured by atomic force microscopy and ellipsometry," Applied physics letters 68(20), 2837-2839 (1996).
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21
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0030270174
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Multiscale roughness in optical multilayers: Atomic force microscopy and light scattering
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C. Deumié, R. Richier, P. Dumas, C. Amra, "Multiscale roughness in optical multilayers: atomic force microscopy and light scattering," Appl. Opt. 35, 5583-5594 (1996).
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Deumié, C.1
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