메뉴 건너뛰기




Volumn 13, Issue 7, 2005, Pages 2403-2418

Angle-resolved ellipsometry of scattering patterns from arbitrary surfaces and bulks

Author keywords

[No Author keywords available]

Indexed keywords

DATA ACQUISITION; ELLIPSOMETRY; FIBER OPTICS; INTERFACES (MATERIALS); LIGHT POLARIZATION; MULTILAYERS; PHASE TRANSITIONS; SPECKLE; SURFACE ROUGHNESS;

EID: 21244491575     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OPEX.13.002403     Document Type: Article
Times cited : (50)

References (21)
  • 1
    • 0018996455 scopus 로고
    • Light scattering from multilayer optics: Comparison of theory and experiment
    • J. M. Elson, J. P. Rahn, and J. M. Bennett, "Light scattering from multilayer optics: comparison of theory and experiment," Appl. Opt. 19, 669-679 (1980).
    • (1980) Appl. Opt. , vol.19 , pp. 669-679
    • Elson, J.M.1    Rahn, J.P.2    Bennett, J.M.3
  • 2
    • 0027680901 scopus 로고
    • From light scattering to the microstructure of thin film multilayers
    • C. Amra, "From light scattering to the microstructure of thin film multilayers," Appl. Opt. 32, 5481-5491 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 5481-5491
    • Amra, C.1
  • 3
    • 3342912321 scopus 로고
    • Theory of light scattering from rough surfaces and interfaces and from volume inhomogeneities in an optical layer stack
    • P. Bussemer, K. Hehl, and S. Kassam, "Theory of light scattering from rough surfaces and interfaces and from volume inhomogeneities in an optical layer stack," Waves Random Media 1, 207-221 (1991).
    • (1991) Waves Random Media , vol.1 , pp. 207-221
    • Bussemer, P.1    Hehl, K.2    Kassam, S.3
  • 4
    • 84975655389 scopus 로고
    • Microstructure characterization by angle-resolved scatter and comparison to measurements made by other techniques
    • R. D. Jacobson, S. R. Wilson, G. A. Al-Jumaily, J. R. McNeil, J. M. Bennett, L. Mattson, "Microstructure characterization by angle-resolved scatter and comparison to measurements made by other techniques," Appl. Opt. 31, 1426-1435 (1992).
    • (1992) Appl. Opt. , vol.31 , pp. 1426-1435
    • Jacobson, R.D.1    Wilson, S.R.2    Al-Jumaily, G.A.3    McNeil, J.R.4    Bennett, J.M.5    Mattson, L.6
  • 5
    • 0028367822 scopus 로고
    • Light scattering from multilayer optics. Part A: Investigation tools
    • C. Amra, "Light scattering from multilayer optics. Part A: Investigation tools," J. Opt. Soc. Am. A 11, 197-210 (1994).
    • (1994) J. Opt. Soc. Am. A , vol.11 , pp. 197-210
    • Amra, C.1
  • 6
    • 0028368291 scopus 로고
    • Light scattering from multilayer optics. Part B: Application to experiment
    • C. Amra, "Light scattering from multilayer optics. Part B: Application to experiment," J. Opt. Soc. Am. A 11, 211-226 (1994).
    • (1994) J. Opt. Soc. Am. A , vol.11 , pp. 211-226
    • Amra, C.1
  • 7
    • 84975655868 scopus 로고
    • The role of interface correlation in light scattering by a multilayer
    • C. Amra, J. H. Apfel, E. Pelletier, "The role of interface correlation in light scattering by a multilayer," Appl. Opt. 31, 3134-3151 (1992).
    • (1992) Appl. Opt. , vol.31 , pp. 3134-3151
    • Amra, C.1    Apfel, J.H.2    Pelletier, E.3
  • 8
    • 0027543540 scopus 로고
    • First order vector theory of bulk scattering in optical multilayers
    • C. Amra, "First order vector theory of bulk scattering in optical multilayers," J. Opt. Soc. Am. A 10, 365-374 (1993).
    • (1993) J. Opt. Soc. Am. A , vol.10 , pp. 365-374
    • Amra, C.1
  • 9
    • 84975605156 scopus 로고
    • Light scattering from the volume of optical thin films: Theory and experiment
    • S. Kassam, A. Duparré, K. Hehl, P. Bussemer, and J. Neubert, "Light scattering from the volume of optical thin films: theory and experiment," Appl. Opt. 31, 1304-1313 (1992).
    • (1992) Appl. Opt. , vol.31 , pp. 1304-1313
    • Kassam, S.1    Duparré, A.2    Hehl, K.3    Bussemer, P.4    Neubert, J.5
  • 10
    • 0004533803 scopus 로고    scopus 로고
    • Numerical study of scattering from rough inhomogeneous films
    • H. Giovannini, M. Saillard, A. Sentenac, "Numerical study of scattering from rough inhomogeneous films," J. Opt. Soc. Am. A 15, 1182-1190 (1998).
    • (1998) J. Opt. Soc. Am. A , vol.15 , pp. 1182-1190
    • Giovannini, H.1    Saillard, M.2    Sentenac, A.3
  • 12
    • 0001701356 scopus 로고    scopus 로고
    • Goniometric optical scatter instrument for out-of-plane ellipsometry measurements
    • Germer T.A. and Asmail C. C., "Goniometric optical scatter instrument for out-of-plane ellipsometry measurements," Review of scientific Instruments 70, 3688-3695 (1999).
    • (1999) Review of Scientific Instruments , vol.70 , pp. 3688-3695
    • Germer, T.A.1    Asmail, C.C.2
  • 13
    • 0035504008 scopus 로고    scopus 로고
    • Determination of the phase of the diffracted field in the optical domain. Application to the reconstruction of surface profiles
    • N. Destouches, M. Lequime and H. Giovannini and C.A. Guerin, "Determination of the phase of the diffracted field in the optical domain. Application to the reconstruction of surface profiles," Opt. Comm. 198, 233-239 (2001).
    • (2001) Opt. Comm. , vol.198 , pp. 233-239
    • Destouches, N.1    Lequime, M.2    Giovannini, H.3    Guerin, C.A.4
  • 14
    • 0030269610 scopus 로고    scopus 로고
    • Ellipsometry of light scattering from multilayer coatings
    • C. Deumié, H. Giovannini and C. Amra, "Ellipsometry of light scattering from multilayer coatings," Appl. Opt. 35, 5600-5608 (1996).
    • (1996) Appl. Opt. , vol.35 , pp. 5600-5608
    • Deumié, C.1    Giovannini, H.2    Amra, C.3
  • 15
    • 0036602891 scopus 로고    scopus 로고
    • Angle-resolved ellipsometry of light scattering: Discrimination of surface and bulk effects in substrates and optical coatings
    • C. Deumié, H. Giovannini and C. Amra, "Angle-resolved ellipsometry of light scattering: discrimination of surface and bulk effects in substrates and optical coatings," Appl. Opt. 41, 3362-3369 (2002).
    • (2002) Appl. Opt. , vol.41 , pp. 3362-3369
    • Deumié, C.1    Giovannini, H.2    Amra, C.3
  • 16
    • 0027677462 scopus 로고
    • Multiwavelength (0.45-10.6 μm) angle-resolved scatterometer or how to extend the optical window
    • C. Amra, D. Torricini and P. Roche, "Multiwavelength (0.45-10.6 μm) angle-resolved scatterometer or how to extend the optical window," Appl. Opt. 32, 5462-5474 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 5462-5474
    • Amra, C.1    Torricini, D.2    Roche, P.3
  • 17
    • 0027677835 scopus 로고
    • Comparison of surface and bulk scattering in optical multilayers
    • C. Amra, C. Grèzes-Besset, and L. Bruel, "Comparison of surface and bulk scattering in optical multilayers," Appl. Opt. 32, 5492-5503 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 5492-5503
    • Amra, C.1    Grèzes-Besset, C.2    Bruel, L.3
  • 18
    • 84971961740 scopus 로고
    • Boundary integral equations for the scattering of electromagnetic waves by a homogeneous dielectric obstacle
    • P. A. Martin and P. Ola, "Boundary integral equations for the scattering of electromagnetic waves by a homogeneous dielectric obstacle," Proc. Roy. Soc. Edinburgh, 123A, 185-208 (1993).
    • (1993) Proc. Roy. Soc. Edinburgh , vol.123 A , pp. 185-208
    • Martin, P.A.1    Ola, P.2
  • 19
    • 0035394370 scopus 로고    scopus 로고
    • Rigorous solution for electromagnetic scattering from rough surfaces
    • M. Saillard and A. Sentenac, "Rigorous solution for electromagnetic scattering from rough surfaces," Waves in Random Media 11, 103-137 (2001).
    • (2001) Waves in Random Media , vol.11 , pp. 103-137
    • Saillard, M.1    Sentenac, A.2
  • 20
    • 0000376445 scopus 로고    scopus 로고
    • Comparison of Si surface roughness measured by atomic force microscopy and ellipsometry
    • Fang S. J., Chen W., Yamanaka T., and Helms C. R, "Comparison of Si surface roughness measured by atomic force microscopy and ellipsometry," Applied physics letters 68(20), 2837-2839 (1996).
    • (1996) Applied Physics Letters , vol.68 , Issue.20 , pp. 2837-2839
    • Fang, S.J.1    Chen, W.2    Yamanaka, T.3    Helms, C.R.4
  • 21
    • 0030270174 scopus 로고    scopus 로고
    • Multiscale roughness in optical multilayers: Atomic force microscopy and light scattering
    • C. Deumié, R. Richier, P. Dumas, C. Amra, "Multiscale roughness in optical multilayers: atomic force microscopy and light scattering," Appl. Opt. 35, 5583-5594 (1996).
    • (1996) Appl. Opt. , vol.35 , pp. 5583-5594
    • Deumié, C.1    Richier, R.2    Dumas, P.3    Amra, C.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.