SiO2-based variable microfluidic lenses fabricated by femtosecond laser lithography-assisted micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7039, Issue , 2008, Pages

  Mizoshiri, M ^a   Nishiyama, H ^a   Nishii, J ^b   Hirata, Y ^a  

^a OSAKA UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Femtosecond laser; Fresnel lens; Nonlinear optical absorption; Optofluidics; Variable lens

Indexed keywords

ABSORPTION; CHEMICAL STABILITY; COMPOSITE MICROMECHANICS; ELECTROMAGNETIC WAVE ABSORPTION; ENERGY ABSORPTION; ETCHING; FABRICATION; LASERS; LIGHT; LIGHT ABSORPTION; LITHOGRAPHY; MACHINING; MICROCHANNELS; MICROFLUIDICS; MICROMACHINING; OPTICAL INSTRUMENT LENSES; OPTICAL INSTRUMENTS; PHOTORESISTS; PLASMA ETCHING; PLASMA STABILITY; PLASMAS; PULSED LASER APPLICATIONS; SILICON COMPOUNDS; SILICONES; SOLID STATE DEVICES; ULTRASHORT PULSES;

FEMTOSECOND LASER; FRESNEL LENS; NONLINEAR OPTICAL ABSORPTION; OPTOFLUIDICS; VARIABLE LENS;

LENSES;

EID: 56249085945     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.795053     Document Type: Conference Paper

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