Polyvinyl alcohol templates for low cost, high resolution, complex printing

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3323-3326

  Schaper, Charles D ^a   Miahnahri, Alan ^b  

^a Stanford University   (United States)

^b Transfer Devices Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOIMPRINT LITHOGRAPHY (NIL); SPIN-CAST FILM; STEP-AND-FLASH IMPRINT LITHOGRAPHY (SFIL); TEMPLATES;

CONFORMATIONS; DATA STORAGE EQUIPMENT; ELASTICITY; LITHOGRAPHY; POLYVINYL ALCOHOLS; SURFACE TOPOGRAPHY; THIN FILMS;

PRINTING;

EID: 13244265937     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1827218     Document Type: Conference Paper

References (9)

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2. D. J Resnick et al., Proc. SPIE 4688, 205 (2002).
3. Y. Xia and G. Whitesides, Annu. Rev. Mater. Sci. 28, 153 (1998).
4. C. D. Schaper, J. Microlithogr., Microfabr., Microsyst. 3, 174 (2004).
5. C. D. Schaper, Nano Lett. 3, 1305 (2003).
6. C. D. Schaper, J. Vac. Sci. Technol. B 21, 2961 (2003).
7. C. D. Schaper, Langmuir 20, 227 (2004).
8. C. D. Schaper, Proc. SPIE 5374, 325 (2004).
9. C. D. Schaper, Proc. SPIE 5037, 538 (2003).