Fabrication of solid-state nanopores with single-nanometre precision

Nature Materials

Volumn 2, Issue 8, 2003, Pages 537-540

  Storm, A J ^a   Chen, J H ^a,b   Ling, X S ^a,c   Zandbergen, H W ^a   Dekker, C ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NETHERLANDS INSTITUTE FOR METALS RESEARCH   (Netherlands)

^c BROWN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL MATERIALS; DEFORMATION; ELECTRON ENERGY LOSS SPECTROSCOPY; ETCHING; MOLECULAR DYNAMICS; NANOTECHNOLOGY; POROSITY; PROTEINS; SENSORS; SURFACE TENSION; THERMOOXIDATION; TRANSMISSION ELECTRON MICROSCOPY;

NANODEVICES; SINGLE NANOMETRE PRECISION; SOLID STATE NANOPORES; STATE OF THE ART SILICON TECHNOLOGY;

NANOSTRUCTURED MATERIALS;

SILICON DIOXIDE;

ARTICLE; ARTIFICIAL MEMBRANE; CHEMICAL MODEL; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; CRYSTALLOGRAPHY; ELECTRON; ELECTRON MICROSCOPY; EQUIPMENT DESIGN; EVALUATION; METHODOLOGY; MICROMANIPULATION; NANOTECHNOLOGY; PERMEABILITY; POROSITY; QUALITY CONTROL; RADIATION EXPOSURE; SURFACE PROPERTY; SYNTHESIS; VALIDATION STUDY;

CRYSTALLIZATION; CRYSTALLOGRAPHY; ELECTRONS; EQUIPMENT DESIGN; MEMBRANES, ARTIFICIAL; MICROMANIPULATION; MICROSCOPY, ELECTRON; MODELS, CHEMICAL; MOLECULAR CONFORMATION; NANOTECHNOLOGY; PERMEABILITY; POROSITY; QUALITY CONTROL; SILICON DIOXIDE; SURFACE PROPERTIES;

EID: 0042285088     PISSN: 14761122     EISSN: None     Source Type: Journal    
DOI: 10.1038/nmat941     Document Type: Letter

References (9)

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