Period and height control during the microcontact printing of alkoxysilane for optical gratings

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 6, Issue 2, 2007, Pages

  Benahmed, Arnaud ^a   Lam, Robert ^a   Rechner, Nikolaus ^a   Ho, Chih Ming ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Corrugation height control; Grating period control; Optical grating; Polymer

Indexed keywords

MULTILAYERS; PRINTING; SILANES;

CORRUGATION HEIGHT CONTROL; CORRUGATION HEIGHTS; GRATING PERIOD CONTROL; MULTILAYER POLYMERS;

DIFFRACTION GRATINGS;

MULTILAYERS; OPTICAL ACTIVITY; PRINTING; SILANES;

EID: 34548052023     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2731384     Document Type: Article

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