Rigid organic molds for nanoimprint lithography by replica molding of high glass transition temperature polymers

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 4, 2004, Pages 1759-1763

  Pisignano, Dario ^a,b   D'Amone, Stefania ^a   Gigli, Giuseppe ^a   Cingolani, Roberto ^a  

^a NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

^b UNIVERSITY OF SALENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; ELASTICITY; GLASS TRANSITION; LITHOGRAPHY; POLYMERIZATION; PRESSURE EFFECTS; RESINS; THERMAL EFFECTS; ULTRAVIOLET RADIATION; VISCOSITY;

NANOIMPRINT LITHOGRAPHY; PATTERN TRANSFER; SOFT LITHOGRAPHY; THERMOCURABLE POLYMERS;

POLYCARBONATES;

EID: 4944255294     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1767108     Document Type: Article

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