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Volumn 34, Issue 2, 2010, Pages 307-319

Design and modeling of a six DOFs MEMS-based precision manipulator

Author keywords

Compliant mechanisms; DOFs; Elastic mechanism; Exact constraint design; Flexure mechanisms; Manipulator; MEMS; Micro systems technology; MST; Precision; Six degrees of freedom

Indexed keywords

COMPLIANT MECHANISM; ELASTIC MECHANISM; EXACT CONSTRAINT; FLEXURE MECHANISM; FLEXURE MECHANISMS; MICRO SYSTEMS TECHNOLOGIES;

EID: 75749100206     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2009.08.001     Document Type: Article
Times cited : (66)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.