Failure analysis of a multi-degree-of-freedom spatial microstage

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 97-105

  Walraven, Jeremy A ^a   Jokiel Jr , Bernhard ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); ELECTROSTATIC ACTUATORS; FAILURE (MECHANICAL); FAILURE ANALYSIS; MECHANISMS; POLYSILICON; POSITION CONTROL; RELIABILITY;

MICROPOSITIONING MECHANISMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037721345     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478207     Document Type: Conference Paper

References (6)

1. B. Jokiel Jr., G. L. Benavides, L. F. Bieg, and J. J. Allen, "Planar and Spatial Three-Degree-of-Freedom Microstages in Silicon MEMS,"
2. K. Spanner, and H. Marth, "High-precision piezoelectrically driven microstages," International Conference on Microtechnologies: MICRO.tec 2000, 25-27 sept. 2000, Germany, vol. 2, pp. 581-588.
3. N. C. Macdonald, "Micro-machines for moving nm-scale objects," Proc. of the Sixth International Symposium on Micro Machine and Human Science, 4-6 Oct. 1995, Naoya Japan, p. 53.
4. C. Gonzalez, R. J. Weltry, R. L. Smith, and S. D. Collins, "Microjoinery for optomechanical systems," Proc. of SPIE, Miniaturized systems w/ Micro-Optics and Miccromechanics II, 10-12 Feb. 1996, San Jose, CA, USA vol. 3008, pp. 171-178.
5. Tsai, L., 1999, Robot Analysis, John Wiley, pp. 121-125
6. Hunt, K. H., 1983, "Structural Kinematic of In-Parallel-Actuated Robot Arms," ASME J. Mech. Transm. Autom. Des., Vol. 105, pp. 705-712.