Linear micromotors and spatial micromechanisms based on UV-LIGA

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 399-402

  Cheng, W J ^a   Devoe, D L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); LINEAR MOTORS; MATHEMATICAL MODELS; MICROACTUATORS; MULTILAYERS; NICKEL; SYNCHRONIZATION;

LINEAR MICROMOTORS; SAWTOOTH IMPACTORS; SPATIAL MICROMECHANISMS; UB-LIGA;

MICROELECTROMECHANICAL DEVICES;

EID: 26844494520     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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3. R. Yeh, S. Hollar, and K. S. J. Pister, "Single mask, large force, and large displacement electrostatic linear inchworm motors", J. MEMS,11 (2002), pp. 330-336.
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5. J. M. Maloney, Fabrication and Thermal Actuation of 3-D Micro Electro Mechanical Systems, MS thesis, University of Maryland, College Park, MD, 2001.
6. L. L. Howell, Compliant Mechanisms, John Wiley & Sons, Inc., 2001.