Modular MEMS experimental platform for transmission electron microscopy

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 146-149

  Sarkar, N ^a   Baur, C ^a   Stach, E ^b   Jandric, Z ^a   Stallcup, R ^a   Ellis, M ^a   Skidmore, G ^a   Liu, J ^c   Fedder, G K ^c  

^a ZYVEX CORPORATION   (United States)

^b PURDUE UNIVERSITY   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; ETCHING; ION BEAMS; POSITION CONTROL; TRANSMISSION ELECTRON MICROSCOPY; VIBRATIONS (MECHANICAL);

ELECTROCHEMICAL PROBE ETCHING; FOCUSED ION BEAM (FIB) INSTRUMENT; MECHANICAL STABILITY; MICROASSEMBLY;

MICROELECTROMECHANICAL DEVICES;

EID: 33750107218     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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