Magnetic induction machines integrated into bulk-micromachined silicon

Journal of Microelectromechanical Systems

Volumn 15, Issue 2, 2006, Pages 406-414

  Arnold, David P ^a,b   Das, Sauparna ^c   Cros, Florent ^d,e   Zana, Iulica ^a,f   Allen, Mark G ^d   Lang, Jeffrey H ^c  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b University of Florida   (United States)

^c USA   (United States)

^d GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^e CardioMEMS   (United States)

^f University of Alabama   (United States)

Author keywords

AC generators; Induction machines; Magnetic materials; MEMS; Micromachining

Indexed keywords

AC GENERATORS; ASYNCHRONOUS MACHINERY; ENGINES; MAGNETIC MATERIALS; MICROMACHINING; POWER GENERATION;

BULK-MICROMACHINED SILICON; FUSION-BONDED SILICON; INDUCTION MACHINES; MAGNETIC INDUCTION; POWER GENERATION SYSTEM; SILICON-BASED MICROENGINE;

MICROELECTROMECHANICAL DEVICES;

EID: 33645772000     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.873951     Document Type: Article

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