A single-layer PDMS-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities - Part II: Fabrication and characterization

Journal of Microelectromechanical Systems

Volumn 14, Issue 3, 2005, Pages 558-566

  Tung, Yi Chung ^a   Kurabayashi, Katsuo ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Comb drive actuator; Deep reactive ion etching (DRIE); Laser vibrometry measurement; Multi axis microactuator; PDMS on silicon microsystems

Indexed keywords

ELECTRIC POTENTIAL; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SILICONES;

COMB DRIVE ACTUATOR; DEEP REACTIVE ION ETCHING (DRIE); LASER VIBROMETRY MEASUREMENT; MULTI AXIS MICROACTUATOR; POLY DIMETHYL SILOXANE(PDMS)-ON-SILICON MICROSYSTEMS;

ELECTROSTATIC ACTUATORS;

EID: 22444438036     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.844762     Document Type: Article

References (16)

1. Y.-C. Tung and K. Kurabayshi, "A single-layer PDMS-on-silicon hybrid actuator with multi-axis out-of-plane motion capabilities - Part I: Design and analysis," J. Microelectromech. Syst., vol. 14, no. 3, pp. 548-557, Jun. 2005.
2. A. Rickard and M. McNie, "Characterization and optimization of deep dry etching for MEMS applications," in Proc. SPIE Int. Conf. Microelectron. MEMS Technologies, Edinburgh, U.K., 2001.
3. Y. Xia and G. M. Whitesides, "Soft lithography," Annual Revi. Mater. Sci., vol. 28, pp. 153-184, 1998.
4. J.-B. Yoon, C.-H. Han, E. Yoon, and C.-K. Kim, "Novel two-step baking process for high-aspect-ratio photolithography with conventional thick photoresist," in Proc. SPIE Conf. Materials and Devices Characterization in Micromachining, Santa Clara, CA, 1998.
5. B.-H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, "Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer," J. Microelectromech. Syst., vol. 9, pp. 76-81, 2000.
6. J. R. Anderson, D. T. Chiu, R. J. Jackman, O. Cherniavskaya, J. C. McDonald, H. Wu, S. H. Whitesides, and G. M. Whitesides, "Fabrication of topologically complex three-dimensional microfluidic systems in PDMS by rapid prototyping," Analyt. Chem., vol. 72, pp. 3158-3164, 2000.
7. J. Garra, T. Long, J. Currie, T. Schneider, R. White, and M. Paranjape, "Dry etching of polydimehtylsiloxane for microfluidic systems," J. Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films, vol. 20, pp. 975-982, 2002.
8. A. d. Mello, "Plastic fantastic?," Lab on a Chip, pp. 31N-36N, 2002.
9. U. Srinivasan, D. Liepmann, and R. T. Howe, "Microstructure to substrate self-assembly using capillary forces," J. Microelectromech. Syst., vol. 10, pp. 17-24, 2001.
10. D. H. Gracias, J. Tien, T. L. Breen, C. Hsu, and G. M. Whitesides, "Forming networks in three dimensions by self-assembly," Science, vol. 289, pp. 1170-1172, 2000.
11. D. H. Gracias, M. Boncheva, O. Omoregie, and G. M. Whitesides, "Biomimetic self-assembly of helical electrical circuits using orthogonal capillary interactions," Appl. Phys. Lett., vol. 80, pp. 2802-2804, 2002.
12. H. O. Jacobs, A. R. Tao, A. Schwartz, D. H. Gracias, and G. M. Whitesides, "Fabrication of a cylindrical display by patterned assembly," Science, vol. 296, pp. 323-325, 2002.
13. R. R. A. Syms, E. M. Yeatman, V. M. Bright, and G. M. Whitesides, "Surface tension-powered self-assembly of microstructures - the state-of-the-art," J. Microelectromech. Syst., vol. 12, pp. 387-417, 2003.
14. K. L. Scott, T. Hirano, H. Yang, R. T. Howe, and A. M. Niknejad, "High-performance inductors using capillary based fluidic self-assembly," J. Microelectromech. Syst., vol. 13, pp. 300-309, 2004.
15. H. Schmid, H. Wolf, R. Allenspach, H. Riel, S. Karg, B. Michel, and E. Delamarche, "Preparation of metallic films on elastomereric stamps and their application for contact processing and contact printing," Advanced Functional Materials, vol. 13, pp. 145-153, 2003.
16. S. Kwon and L. P. Lee, "Micromachined transmissive scanning confocal microscope," Opt. Lett., vol. 29, pp. 706-708, 2004.