Microassembled MEMS miniSEM with carbon nanotube emitter

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 918-921

  Saini, R ^a   Jandric, Z ^a   Nolan, M ^a   Mentink, S A M ^b  

^a ZYVEX CORPORATION   (United States)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; CARBON NANOTUBES; ELECTRON BEAMS; ELECTRON ENERGY LEVELS; SCANNING ELECTRON MICROSCOPY; SILICON ON INSULATOR TECHNOLOGY;

FIELD OF VIEW (FOV); MICROASSEMBLY; MICROCOLUMN SUBSTRATES;

MICROELECTROMECHANICAL DEVICES;

EID: 33750115123     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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