Magnetic induction micromachine - Part II: Fabrication and testing

Journal of Microelectromechanical Systems

Volumn 15, Issue 2, 2006, Pages 427-439

  Cros, Florent ^a,c   Koser, Hur ^b   Allen, Mark G ^c   Lang, Jeffrey H ^d  

^a CardioMEMS   (United States)

^b Yale University   (United States)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^d Department of Electrical Engineering and Computer Science   (United States)

Author keywords

Electroplating; Magnetic induction micromachine; Micromolding; Micromotor; Tethers

Indexed keywords

ACTUATORS; ELECTRIC CURRENTS; ELECTRIC GENERATORS; ELECTROPLATING; FABRICATION; INDUCTION MOTORS; MAGNETIC DEVICES; MAGNETIC FLUX; TESTING;

ELECTROMAGNETIC ACTUATOR; FABRICATION PROCESS; MAGNETIC INDUCTION MACHINE; MICROGENERATORS; POWER DENSITY; TETHERED INDUCTION MICROMOTOR;

MICROELECTROMECHANICAL DEVICES;

EID: 33645757579     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.872239     Document Type: Article

References (21)

1. A. H. Epstein et al., "Power MEMS and microengines," in Proc. IEEE Int. Conf. Solid State Sens. Actuators, vol. 2, Chicago, IL, Jun. 1997, pp. 753-756.
2. K. Fu, A. J. Knobloch, F. C. Martinez, D. C. Walther, A. P. Pisano, and D. Leipmann, "Design and fabrication of a silicon-based MEMS rotary engine," in Proc. MEMS, 2001 ASME Int. Mech. Eng. Congr. Exp., 2001, pp. 875-880.
3. S. F. Nagle, "Analysis, Design and Fabrication of an Electric Induction Micromotor for a Microgas Turbine Generator," Ph.D. dissertation, Massachusetts Institute of Technology, Cambridge, MA, Oct. 2000.
4. H. Koser, "Development of Magnetic Induction Machines for Micro Turbo Machinery," Ph.D. dissertation, Massachusetts institute of Technology, Cambridge, MA, Jun. 2002.
5. J. Park, S. H. Han, and M. G. Allen, "Batch-fabricated microinductors with electroplated magnetically anisotropic and laminated alloy cores," IEEE Trans. Magn., vol. 35, no. 5. pp. 4291-4300, 1999.
6. J. Park, J. Y. Park, Y. Joung, and M. G. Allen, "Fabrication of high current and low profile micromachined inductor with laminated Ni/Fe core," IEEE Trans. Compon. Packag. Technol., vol. 25, pp. 106-111, 2002.
7. J. Park, F. Cros, and M. G. Allen, "A sacrificial layer approach to highly laminated magnetic cores," in Proc. IEEE Int. Conf. MEMS, Las Vegas, NV, Jan. 2002, pp. 380-383.
8. M. Xu, T. M. Liakopoulos, C. H. Ahn, S. H. Han, and H. J. Kim, "A microfabricated transformer for high-frequency power of signal conversion," IEEE Trans. Magn., vol. 34, pp. 1369-1371, 1998.
9. O. V. Seidemann and S. Buttgenbach, "Microcoils abd microrelays: An optimized multilayer fabrication process," Sens. Actuators A, Phys., vol. 83, pp. 124-129, 2000.
10. M. Ruan, J. Shen, and C. B. Wheeler, "Latching micro magnetic relays with multistrip permalloy cantlevers," in Proc. IEEE Int. Conf. MEMS, Interlaken, Switzerland, Jan. 2001, pp. 224-227.
11. W. P. Taylor, "The Design and Fabrication of Fully Integrated Magnetically Actuated Micromachined Relays," Ph.D. dissertation, Georgia Institute of Technology, Atlanta, GA, 1998.
12. W.P. Taylor and G. Allen, "Integrated magnetic microrelays: Normally open, normally closed, and multi-pole," in Proc. IEEE Int. Conf. Solid-State Sens. Actuators, vol. 2, Chicago, IL, Jun. 1997, pp. 1149-1152.
13. T. R. Christenson, T. J. Garino, E. L. Venturini, and D. M. Berry, "Application of deep X-ray lithography fabricated rare earth permanent magnets to Multipole magnetic microactuators," in Proc. 10th Int. Conf. Solid State Sens. Actuators (Transducers), vol. 1, Jun 1999, pp. 98-101.
14. V. Seidemann, M. Ohnmacht, and S. Buttgenbach, "An optimized multilayer fabrication process for high aspect ratio electromagnetic devices and microsystems (MEMS)," in Proc. IEEE Int. Conf. Solid-State Sens. Actuators, The Hague, The Netherlands, Sep. 1999, pp. 102-105.
15. H. Koser and J. H. Lang, "Modeling a high power density MEMS magnetic induction machine," in Proc. Int. Conf. Model. Simul. Microsyst., Hilton Head, SC, Mar. 2001, pp. 286-289.
16. F. Cros, "Développement et test d'une nucromachine à induction magnétique et techniques de microfabrication pour microcomposant électromagnétique," Ph.D. Thesis, Ecole doctorale de Toulouse, France, Sep. 2002.
17. W. P. Taylor, M. Schneider, H. Baltes, and M. G. Allen, "Electroplated soft magnetic materials for microsensors and microactuators," in Proc. IEEE Int. Conf. Solid-State Sens. Actuators, vol. 2, Chicago, IL, Jun. 1997, pp. 1445-1448.
18. J. W. Judy, R. S. Muller, and H. H. Zappe, "Magnetic micro actuation of polysilicon flexure structures," J. Microelectromech. Syst., vol. 4, no. 4, pp. 162-169, 1995.
19. L. M. Ting, J. S. May, W. R. Hunter, and J. W. McPherson, "AC electromigration characterization and modeling of multilayered interconnects," in Proc. Rel. Phys. Symp., Atlanta, GA, Mar. 1993, pp. 311-316.
20. W. Hemmert, M. S. Mermelstein, and D. M. Freeman, "Nanometer resolution of three-dimensional motions using video interference microscopy," in Proc. IEEE Int. Conf. MEMS, Orlando, FL, Jan. 1999, pp. 302-308.
21. H. Lorenz, M. Despont, N. Fahrni, N. LaBianca, P. Renaud, and P. Vetiger, "SU-8: A low-cost negative resist for MEMS," J. Micromech. Microeng., vol. 7, no. 3, pp. 121-124, 1997.