Numerical evaluation of piezo, thermo, electro-magnetic and electro-static MEMS actuators based on designs

Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006

Volumn 1, Issue , 2006, Pages 172-175

  Brouwer, D M ^a   De Jong, B R ^b   Soemers, H M J R ^a,c   Krijnen, G J M ^b  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; ELECTROSTATIC ACTUATORS; PRECISION ENGINEERING;

ACTUATION PRINCIPLES; CHARACTERISTIC TIME; MEMS ACTUATORS; MINIMUM VOLUMES; PEAK-TO-PEAK; PIEZO ACTUATOR; PRISMATIC BEAM; SCALING DOWN;

MAGNETIC ACTUATORS;

EID: 75749144018     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. F. Bancel et al., Three-Dimensional analytical Optimization of Permanent Magnets Alternated Structure, IEEE Transactions of Magnetics 34, NO 1. Jan 1998.
2. S.L. Paalvast, Design of MEMS thermal actuators, Master Thesis. Faculty of Design, Apr 2003, Delft, the Netherlands.