A planar 3 DOF sample manipulator for nano-scale characterization

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 750-753

  De Jong, B R ^a   Brouwer, D M ^b   Jansen, H V ^a   De Boer, M J ^a   Lammertink, T G ^c   Stramigioli, S ^c   Krijnen, G J M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; DEGREES OF FREEDOM (MECHANICS); ELASTIC MODULI; SINGLE CRYSTALS;

FLEXURE STIFFNESS; MONOLITHIC MANIPULATORS; SINGLE CRYSTALLINE SILICON (SCS);

MANIPULATORS;

EID: 33750126847     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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2. H-Y. Chu, Transducers 2005, pp. 737-740
3. Y-C. Tung and K. Kurabayashi. Journal of MEMS, 14 (2005), pp 548-557
4. B. Jokiel et al., ASPE Meeting 2001, 25, pp.32-35
5. Wortman, J.J., R.A. Evans, J. Appl. Phys. 36 (1965), pp. 153-156
6. R. Legtenberg et al., Journal of Micromechanics and Microengineering, 6 (1996), pp. 320-329