Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power

Journal of Applied Physics

Volumn 106, Issue 11, 2009, Pages

  Massereau Guilbaud, V́ronique ^a   Ǵraud Grenier, Isabelle ^a   Plain, Andŕ ^a  

^a UNIVERSITÉ D'ORLÉANS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BALANCE MODEL; BALMER LINES; EMISSION LINES; FUNCTION OF TIME; HYDROGEN EMISSIONS; HYDROGENATED CARBON FILMS; METHANE PLASMA; PARTICLE BEHAVIOR; PLASMA BULK; RADIO FREQUENCIES; RATIO METHOD; RF-POWER; SELF BIAS VOLTAGE; TEMPORAL VARIATION; TWO-LINE;

CARBON FILMS; ELECTRIC DISCHARGES; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; LIGHT EMISSION; METHANE; OPTICAL EMISSION SPECTROSCOPY; PHOTORESISTS; PLASMA DIAGNOSTICS;

INTEGRATED OPTOELECTRONICS;

EID: 72449182230     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3267292     Document Type: Article

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