High quality diamond formation by electron temperature control in methane-hydrogen plasma

Plasma Sources Science and Technology

Volumn 12, Issue 4, 2003, Pages

  Shimizu, Tetsuji ^a   Iizuka, Satoru ^a   Kato, Kohgi ^a   Sato, Noriyoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTRONS; GLOW DISCHARGES; MAGNETRONS; METHANE; NUCLEATION; PLASMAS; PRESSURE; TEMPERATURE CONTROL;

ELECTRON TEMPERATURE CONTROL; GLOW DISCHARGE PLASMA; GRAPHITE FILM; METHANE-HYDROGEN PLASMA; MODIFIED MAGNETRON-TYPE RADIO-FREQUENCY PLASMA;

DIAMONDS;

EID: 0345015546     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/4/316     Document Type: Article

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