Analysis of particulates generated in a radiofrequency methane plasma by laser light scattering and optical spectroscopy

EPJ Applied Physics

Volumn 8, Issue 1, 1999, Pages 53-59

  Geraud Grenier I ^a   Massereau Guilbaud, V ^a   Plain, A ^a  

^a UNIVERSITÉ D'ORLÉANS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CARBON; EMISSION SPECTROSCOPY; LASER APPLICATIONS; LIGHT EMISSION; LIGHT SCATTERING; METHANE; PARTICLE SIZE ANALYSIS;

RADIOFREQUENCY PLASMAS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0033204640     PISSN: 12860042     EISSN: None     Source Type: Journal    
DOI: 10.1051/epjap:1999229     Document Type: Article

References (29)

1. G.S. Selwin, J. Singh, R.S. Benett, J. Vac. Sci. Technol. A 7, 2758 (1989).
2. G.S. Selwin, J.S. McKillop, K.L. Haller, J.J. Wu, J. Vac. Sci. Technol. A 8, 1726 (1990).
3. G.M. Jellum, D.B. Graves, J. Appl. Phys. 67, 6490 (1990).
4. M.M. Smadi, G.Y. Kong, R.N. Carlile, S.E. Beck, J. Vac. Sci. Tech. B 10, 30 (1992).
5. L.F. Allard, E. Voelkl, D.S. Kalakkad, A.K. Datye, J. Mat. Sci. 29, 5612 (1994).
6. Y. Saito, M. Matsuda, Jpn J. Appl. Phys. 34, 5594 (1995).
7. L. Spitzer. Physical Processes in the interstellar Medium (Wiley, New-York, 1978).
8. B.N. Khare, W.R. Thompson, L. Cheng, C. Chyba, C. Sagan, E.T. Arakawa, C. Meisse, P.S. Tuminello, Icarus 103, 290 (1993).
9. Plasma Sources Sci. Technol. 3, No. 3 (1994). Proceedings of the NATO Advanced Research, Worshop on Particles in Plasma.
10. A. Bouchoule, A. Plain, L. Boufendi, J.Ph. Blondeau, C. Laure, J. Appl. Phys. 70, 1991 (1991).
11. Y. Watanabe, M. Shiratani, H. Kawasaki, S. Singh, T. Fukuzawa, Y. Ueda, H. Ohkura, J. Vac. Sci. Technol. A 14, 540 (1996).
12. G. Praburam, J. Goree, J. Vac. Sci. Technol. A 12, 3137 (1994).
13. Y. Hayashi, K. Tachibana, Jpn J. Appl. Phys. 33, 4208 (1994).
14. G.M. Jellum, J.E. Daugherty, D.B. Graves, J. Appl. Phys. 69, 6923 (1991).
15. J. Perrin, P. Molinas-Mata, P. Belenguer, J. Phys. D. Appl. Phys. 27, 2499 (1994).
16. A. Merad, Ph.D. thesis, University of Toulouse, France, 1998.
17. A. Rhallabi, Ph.D. thesis, University of Nantes, France, 1992.
18. R.J. Seeböck, W. Böhme, W.E. Köhler, M. Römheld, S. Veprek, Plasma Sources Sci. Technol. 3, 359 (1994).
19. L. Talbot, R.K. Cheng, R.W. Schefer, D.R. Willis, J. Fluid. Mech. 101, 737 (1980).
20. L. Boufendi, A. Bouchoule, R.K. Porteous, J.Ph. Blondeau, A. Plain, C. Laure, J. Appl. Phys. 673, 2160 (1993).
21. Th. Trottenberg, A. Melzer, A. Piel, Plasma Sources Sci. Technol. 4, 450 (1995).
22. K. Tachibana, T. Mukai, A. Yuuki, Y. Matsui, H. Harima, Jpn J. Appl. Phys. 29, 2156 (1990).
23. Ph. Belenguer, J.Ph. Blondeau, L. Boufendi, M. Toogood, A. Plain, A. Bouchoule, C. Laure, Phys. Rev. A 46, 7923 (1992).
24. K.J. Clay, S.P. Speakman, G.A.J. Amaratunga, S.R.P. Silva, J. Appl. Phys. 79, 7227 (1996).
25. J.P. Boeuf, Phys. Rev. A 46, 7910 (1992).
26. Y. Watanabe, M. Shiratani, T. Fukuzawa, H. Kawasaki, Plasma Sources Sci. Technol. 3, 355 (1994).
27. N.V. Mantzaris, E. Gogolides, A.G. Boudouvis, A. Rhallabi, G. Turban, J. Appl. Phys. 79, 3718 (1996).
28. C.F. Bohren, D.R. Hauffman, Absorption and Scattering of Light by Small Particles (Wiley, New-York, 1983).
29. J.L. Dorier, Ch. Hollenstein, A.A. Howling, J. Vac. Sci. Technol. A 13, 918 (1994).