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High Temperature Material Processes

Volumn 8, Issue 1, 2004, Pages 23-30

Dust particle formation in a low pressure CH4-N2 radio-frequency (13.56 MHz) plasma

(3) Geraud Grenier, Isabelle a Massereau Guilbaud, Véronique a Plain, André a

a UNIVERSITÉ D'ORLÉANS (France)

Author keywords

Amorphous hydrogenated carbon nitride; Dusty plasma; Nanoparticle

Indexed keywords

EID: 33746506090 PISSN: 10933611 EISSN: None Source Type: Journal
DOI: 10.1615/HighTempMatProc.v8.i1.20 Document Type: Article

Times cited : (1)

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