Using OES to determine electron temperature and density in low-pressure nitrogen and argon plasmas

Plasma Sources Science and Technology

Volumn 17, Issue 2, 2008, Pages

  Zhu, Xi Ming ^a   Pu, Yi Kang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; NITROGEN; OPTICAL EMISSION SPECTROSCOPY;

KINETIC MODELS; LOW-PRESSURE NITROGEN PLASMAS;

PLASMAS;

EID: 43149105153     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/2/024002     Document Type: Article

References (21)

1. Behringer K and Fantz U 1994 Spectroscopic diagnostics of glow discharge plasmas with non-Maxwellian electron energy distributions J. Phys. D: Appl. Phys. 27 2128
2. 2/He dc glow discharges by optical spectroscopy and probes Plasma Sources Sci. Technol. 7 298
3. Donnelly V M 2004 Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy J. Phys. D: Appl. Phys. 37 R217
4. Zhu X M and Pu Y K 2007 A simple collisional-radiative model for low-pressure argon discharges J. Phys. D: Appl. Phys. 40 2533
5. McWhirter R W P 1965 Spectral intensities Plasma Diagnostic Techniques (New York: Academic) chapter 5
6. Cunningham P S 1955 U. S. At. Energy Comm. Rept. No Wash.-289, 279
7. Guerra V, Sá P A and Loureiro J 2004 Kinetic modeling of low-pressure nitrogen discharges and post-discharges Eur. Phys. J. Appl. Phys. 28 125
8. Zhu X M and Pu Y K 2006 A molecular kinetic model for the optical emission spectroscopy technique in nitrogen inductively coupled plasma Phys. Plasmas 13 063507
9. Vlek J 1989 A collisional-radiative model applicable to argon discharges over a wide range of conditions: I. Formulation and basic data J. Phys. D: Appl. Phys. 22 623
10. Bultel A, van Ootegem B, Bourdon A and Vervisch P 2002 Influence of in an argon collisional-radiative model Phys. Rev. E 65 046406
11. Yanguas-Gil A, Cotrino J and González-Elipe A R 2006 Measuring the electron temperature by optical emission spectroscopy in two temperature plasmas at atmospheric pressure: a critical approach J. Appl. Phys. 99 033104
12. Zhu X M and Pu Y K 2005 Determining the electron temperature in inductively coupled nitrogen plasmas by optical emission spectroscopy with molecular kinetic effects Phys. Plasmas 12 103501
13. Zhu X M and Pu Y K 2006 A novel method to determine electron density by optical emission spectroscopy in low-pressure nitrogen plasmas Phys. Plasmas 13 123501
14. Zhu X M, Chen W C, Zhang S, Guo Z G, Hu D W and Pu Y K 2007 Electron density and ion energy dependence on driving frequency in capacitively coupled argon plasmas J. Phys. D: Appl. Phys. 40 7019
15. Zhu X M and Pu Y K 2007 A simple collisional-radiative model for low-pressure argon-oxygen mixture discharges J. Phys. D: Appl. Phys. 40 5202
16. 2) atoms with 22 reagent gases J. Chem. Phys. 115 3144
17. 2 glow discharge Plasma Sources Sci. Technol. 6 373
18. 2 post-discharge reactor J. Phys. D: Appl. Phys. 40 1990
19. 4 addition in the post-discharge for nitrocarburizing treatments J. Phys. D: Appl. Phys. 40 3620
20. 2 mixture plasma J. Quant. Spectrosc. Radiat. Transfer 107 361
21. Pu Y K, Yu Z D and Guo Z G 2005 Effect of wall reflection on the determination of electron temperature by the line-ratio method in inductively coupled plasmas Phys. Plasmas 12 113301