Spatially resolved atomic excitation temperatures in CH4/H 2 and C3H8/H2 RF discharges by optical emission spectroscopy

Plasma Sources Science and Technology

Volumn 16, Issue 3, 2007, Pages 434-440

  Chingsungnoen, A ^a   Wilson, J I B ^b   Amornkitbamrung, V ^a   Thomas, C ^a   Burinprakhon, T ^a  

^a Khon Kaen University   (Thailand)

^b HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; ELECTRIC DISCHARGES; EXCITATION ENERGY; METHANE; OPTICAL EMISSION SPECTROSCOPY; THERMAL ENERGY;

ACTINOMETERS; LOW PRESSURE PLASMAS; OPTICAL EMISSION LINES; RADIO-FREQUENCY (RF) PLASMA SYSTEMS;

PLASMA WAVES;

EID: 34547741218     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/3/002     Document Type: Article

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