Time-resolved cavity ringdown spectroscopy on nanoparticle generation in a SiH4-H2 VHF plasma

Journal of Non-Crystalline Solids

Volumn 354, Issue 19-25, 2008, Pages 2096-2099

  Nagai, Takehiko ^a   Smets, Arno H M ^a   Kondo, Michio ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Amorphous semiconductors; Atomic absorption; Measurement techniques; Optical properties; Optical spectroscopy; Silicon; Time resolved measurements

Indexed keywords

EMISSION SPECTROSCOPY; MEASUREMENT THEORY; NANOPARTICLES; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SILICON;

ATOMIC ABSORPTION; PLASMA PULSES; TIME-RESOLVED MEASUREMENTS;

AMORPHOUS SEMICONDUCTORS;

EID: 42649086805     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2007.09.009     Document Type: Article

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