Dust particle formation in low pressure Ar/CH4 and Ar/C2H2 discharges used for thin film deposition

Vacuum

Volumn 71, Issue 3 SPEC., 2003, Pages 377-390

  Berndt, J ^a   Hong, S ^a   Kovacevic E ^a   Stefanovic I ^a   Winter, J ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DUST; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT SCATTERING; METHANE; PLASMAS;

DUST FORMATION;

THIN FILMS;

EID: 0037454456     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00767-4     Document Type: Conference Paper

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