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Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 1233-1237

Optical emission diagnostics of permanent and pulsed microwave discharges in H2-CH4-N2 for diamond deposition

(4) Chatei, Hassan a Bougdira, Jamal a Remy, Michel a Alnot, Patrick a

a UNIVERSITÉ DE LORRAINE (France)

Author keywords

Diamond growth; Dynamic actinometry; Pulsed microwave discharge; Time resolved optical emission spectroscopy

Indexed keywords

ARGON; ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; FILM GROWTH; HYDROGEN; METHANE; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE CHEMISTRY;

DYNAMIC ACTINOMETRY; PULSED MICROWAVE PLASMAS;

DIAMOND FILMS;

EID: 0033340598 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(99)00109-7 Document Type: Article

Times cited : (8)

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