Effects of reactor pressure on two-dimensional radio-frequency methane plasma: a numerical study

Plasma Sources Science and Technology

Volumn 8, Issue 3, 1999, Pages 412-420

  Bera, K ^a   Farouk, B ^a   Lee, Y H ^a  

^a Drexel University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRON ENERGY LEVELS; MATHEMATICAL MODELS; METHANE; MOLECULAR DYNAMICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; PRESSURE EFFECTS;

CHARGED SPECIES DYNAMICS; DC BIAS; POLYATOMIC GAS DISCHARGE; RADIO FREQUENCY METHANE PLASMA;

GLOW DISCHARGES;

EID: 0032654111     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/8/3/311     Document Type: Article

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