Electron energy distribution functions and rate and transport coefficients of H2/H/CH4 reactive plasmas for diamond film deposition

Plasma Chemistry and Plasma Processing

Volumn 16, Issue 2, 1996, Pages 153-171

  Capitelli, M ^a   Colonna, G ^a   Hassouni, K ^b   Gicquel, A ^b  

^a UNIVERSITY OF BARI   (Italy)

^b UNIVERSITÉ PARIS 13   (France)

Author keywords

CH4 H2 plasma; Diamond films; Electron energy distribution function; Transport coefficients

Indexed keywords

EID: 0000001525     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF01570175     Document Type: Article

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