5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million

Sensors and Actuators, A: Physical

Volumn 156, Issue 1, 2009, Pages 28-35

  Lee, J E Y ^a   Seshia, A A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Bulk mode; High quality factor; Resonators

Indexed keywords

BULK-MODE; CONTOUR MODE; DC BIAS VOLTAGE; DISK RESONATOR; ELECTRICAL CHARACTERIZATION; HIGH QUALITY FACTOR; HIGH QUALITY FACTORS; IN-VACUUM; MICRO RESONATORS; MICROMACHINING PROCESS; MICROMECHANICAL DISK RESONATORS; MOTIONAL RESISTANCE; QUALITY FACTORS; QUARTZ CRYSTAL RESONATOR; RESONANT FREQUENCIES; RESONANT MODE; RESONANT STRUCTURES; SINGLE CRYSTAL SILICON;

BIAS VOLTAGE; CRYSTAL RESONATORS; DISKS (STRUCTURAL COMPONENTS); GLASS; MICROMACHINING; NATURAL FREQUENCIES; OXIDE MINERALS; QUARTZ; SILICON WAFERS; SINGLE CRYSTALS; VACUUM; WINE;

Q FACTOR MEASUREMENT;

EID: 71649084588     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.02.007     Document Type: Article

References (23)

1. Kim S.-J., Ono T., and Esashi M. Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique. Rev. Sci. Instrum. 78 (2007) 085103
2. Lee J.E.-Y., Bahreyni B., Zhu Y., and Seshia A.A. Ultrasensitive mass balance based on a bulk acoustic mode silicon crystal silicon resonator. Appl. Phys. Lett. 91 (2007) 234103
3. Nguyen C.T.-C. MEMS technology for timing and frequency control. IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 54 2 (2007) 251-270
4. Nguyen C.T.-C., and Howe R.T. An integrated CMOS resonator high-Q oscillator. IEEE J. Solid-State Circuits 34 4 (1999) 440-455
5. Srikar V.T., and Senturia S.D. Thermoelastic damping in fine-grained polysilicon flexural beam resonators. IEEE/ASME J. Microelectromech. Syst. 11 5 (2002) 499-504
6. Lin Y.-W., Lee S., Li S.-S., Xie Y., Ren Z., and Nguyen C.T.-C. Series-resonant VHF micromechanical resonator reference oscillators. IEEE J. Solid-State Circuits 39 12 (2004) 2477-2491
7. Corman T., Enoksson P., and Stemme G. Gas damping of electrostatically excited resonators. Sens. Actuators A 61 1-3 (1998) 249-255
8. Chandorkar S.A., Agarwal M., Melamud R., Candler R.N., Goodson K.E., and Kenny T.W. Limits of quality factor in bulk-mode micromechanical resonators. Technical Digest of 21st IEEE International Conference on Micro Electro Mechanical Systems. Tucson, AZ, January (2008) 74-77
9. Wang K., Wong A.-C., and Nguyen C.T.-C. VHF free-free beam high Q micro-mechanical resonators. IEEE/ASME J. Microelectromech. Syst. 9 3 (2000) 347-360
10. Lee J.E.-Y., Bahreyni B., and Seshia A.A. An axial strain modulated double ended tuning fork electrometer. Sens. Actuators A 148 2 (2008) 395-400
11. Pourkamali S., Hashimura A., Abdolvand R., Ho G.K., Erbil A., and Ayazi F. High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps. IEEE/ASME J. Microelectromech. Syst. 12 4 (2003) 487-496
12. Wang J., Butler J.E., Feygelson T., and Nguyen C.T.-C. 1.51-GHz polydiamond micromechanical disk resonator with impedance-mismatched isolating support. Proceedings of 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht, The Netherlands, January (2004) 641-644
13. Mattila T., Kiihamäki J., Lamminmäki T., Jaakkola O., Rantakari P., Oja A., Seppä H., Kattelus H., and Tittonen I. A 12 MHz micromechanical bulk acoustic mode oscillator. Sens. Actuators A 101 1-2 (2002) 1-9
14. Clark J.R., Hsu W.-T., Abdelmoneum M.A., and Nguyen C.T.-C. High-Q UHF micromechanical radial-contour mode disk resonators. IEEE/ASME J. Microelectromech. Syst. 14 6 (2005) 1298-1310
15. Pourkamali S., Hao Z., and Ayazi F. VHF single crystal silicon capacitive elliptic bulk-mode disk resonators-part II: implementation and characterization. IEEE/ASME J. Microelectromech. Syst. 13 6 (2004) 1054-1062
16. Li S.-S., Lin Y.-W., Xie Y., and Nguyen C.T.-C. Micromechanical "hollow-disk" ring resonators. Proceedings of 17th IEEE International Conference on Micro Electro Mechanical Systems, vol. 25-29. Maastricht, The Netherlands, January (2004) 821-824
17. Lee J.E.-Y., Bahreyni B., Zhu Y., and Seshia A.A. A single-crystal-silicon bulk-acoustic-mode microresonator oscillator. IEEE Electr. Dev. Lett. 29 7 (2008) 701-703
18. Khine L., Palaniapan M., and Wong W.K. 6 MHz bulk-mode resonator with Q values exceeding one million. Proceedings of 14th International Conference on Solid-state Sensors, Actuators, and Microsystems. Lyon, France, June (2008) 2445-2448
19. Watanabe F., and Watanabe T. Convex quartz crystal resonator of extremely high Q in 10 MHz-50 MHz. Proceedings of 2002 IEEE Ultrasonics Symposium. Munich, Germany, October (2002) 1007-1010
20. Lee J.E.-Y., Zhu Y., and Seshia A.A. A bulk acoustic mode single-crystal silicon microresonator with a high quality factor. J. Micromech. Microeng. 18 6 (2008) 064001
21. Hao Z., Pourkamali S., and Ayazi F. VHF single crystal silicon capacitive elliptic bulk-mode disk resonators-part I: design and modeling. IEEE/ASME J. Microelectromech. Syst. 13 6 (2004) 1054-1062
22. Brantley W.A. Calculated elastic constants for stress problems associated with semiconductor devices. J. Appl. Phys. 44 1 (1973) 534-535
23. Lee J.E.-Y., Zhu Y., and Seshia A.A. High Q bulk acoustic mode resonator operating in ambient pressure. Proceedings of 19th Micro-Mechanics Europe Workshop. Guimaraes, Portugal, September (2007) 293-296