Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator

Applied Physics Letters

Volumn 91, Issue 23, 2007, Pages

  Lee, J E Y ^a   Bahreyni, B ^a   Zhu, Y ^a   Seshia, A A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); FREQUENCY SHIFT KEYING; FREQUENCY STABILITY; MICROMACHINING; OPTICAL RESOLVING POWER; SENSITIVITY ANALYSIS; SILICON; SINGLE CRYSTALS;

ACOUSTIC RESONANT MODES; ELECTRONIC AMPLIFIERS; MASS BALANCE;

CRYSTAL RESONATORS;

EID: 36849008064     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2822405     Document Type: Article

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