Gas damping of electrostatically excited resonators

Sensors and Actuators, A: Physical

Volumn 61, Issue 1-3, 1997, Pages 249-255

  Corman, Thierry ^a   Enoksson, Peter ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Electrostatically excited resonators; Gas damping; Q factor

Indexed keywords

DAMPING; ELECTROSTATICS; HELIUM NEON LASERS; MICROMACHINING; PHOTODETECTORS; PRESSURE EFFECTS; Q FACTOR MEASUREMENT; SEMICONDUCTING SILICON;

ELECTROSTATICALLY EXCITED RESONATORS; GAS DAMPING;

RESONATORS;

EID: 0031169981     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80270-1     Document Type: Article

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