Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique

Review of Scientific Instruments

Volumn 78, Issue 8, 2007, Pages

  Kim, Sang Jin ^a   Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CRYSTALLINE MATERIALS; ETHANOL; OSCILLATORS (ELECTRONIC); RESONANT CIRCUITS; SENSORS; SILICON; SPURIOUS SIGNAL NOISE;

CAPACITIVE DETECTION; MASS DETECTION; NOISE AMPLITUDE;

RESONATORS;

SILICON;

ARTICLE; CHEMISTRY; COMPUTER AIDED DESIGN; ELECTRIC CAPACITANCE; EQUIPMENT; EQUIPMENT DESIGN; GAS; IMPEDANCE PLETHYSMOGRAPHY; INSTRUMENTATION; METHODOLOGY; MICROELECTRODE; MOLECULAR WEIGHT; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER;

COMPUTER-AIDED DESIGN; ELECTRIC CAPACITANCE; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; GASES; MICROELECTRODES; MOLECULAR WEIGHT; PLETHYSMOGRAPHY, IMPEDANCE; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SILICON; TRANSDUCERS;

EID: 34548413696     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2766840     Document Type: Article

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