An axial strain modulated double-ended tuning fork electrometer

Sensors and Actuators, A: Physical

Volumn 148, Issue 2, 2008, Pages 395-400

  Lee, Joshua E Y ^a   Bahreyni, Behraad ^a   Seshia, Ashwin A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Electrometer; Resonator oscillator; Silicon on insulator (SOI) process; Strain sensor

Indexed keywords

ELECTRIC CURRENTS; ELECTROMETERS; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); SILICON; TUNING;

AXIAL STRAINS; CHARGE SENSING; CLOSED LOOP CIRCUITS; CRYSTAL SILICONS; ELECTRONIC NOISES; INPUT CAPACITORS; NONLINEAR OSCILLATORS; OSCILLATOR CIRCUITS; QUALITY FACTORS; RESONANT FREQUENCIES; ROOM TEMPERATURES; SILICON-ON-INSULATOR (SOI) PROCESS; STRAIN RESOLUTIONS; STRAIN SENSOR; TERM FREQUENCIES; TUNING FORKS;

RESONATORS;

EID: 56549087213     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.09.010     Document Type: Article

References (27)

1. Taylor S., Tindall R.F., and Syms R.R.A. Silicon based quadrupole mass spectrometry using microelectromechanical systems. J. Vac. Sci. Technol. B 19 March (2) (2001) 557-562
2. Krueger F., and Larson J. Chipmunk IV: development of and experience with a new generation of radiation area monitors for accelerator applications. Nucl. Instrum. Methods Phys. Res. A 495 August (1) (2002) 20-28
3. Chow S.Y., Kunze D., Brown A.M., and Woodbury D.M. Chloride and potassium activities in luminal fluid of turtle thyroid follicles as determined by selective ion-exchanger microelectrodes. Proceedings of the National Academy of Sciences, vol. 67, no. 2, October (1970) 998-1004
4. M. Buehler, L.-J. Cheng, O. Orient, R. Gompf, J. Bayliss, J. Rauwerdink, J. Marshall, MECA electrometer initial experimental results, in: Proceedings of the 5th International Conference on Mars, Pasadena, July 19-24, 1999 (abstract no. 6189).
5. Zimmerli G., Giles T.M., Kautz R.L., and Martinis J.M. Noise in the Coulomb blockade electrometer. Appl. Phys. Lett. 61 (1992) 237-239
6. Pashkin Yu.A., Nakamura Y., and Tsai J.S. Room temperature Al single-electron transistor made by electron-beam lithography. Appl. Phys. Lett. 76 (2000) 2255-2258
7. Clement N., and Inokawa H. Foundry metal-oxide-semiconductor field-effect transistor electrometer for single-electron detection. Jpn. J. Appl. Phys. 44 (2005) 4855-4858
8. Riehl P.S., Scott K.L., Muller R.S., Howe R.T., and Yasaitis J.A. Electrostatic charge and field sensors based on micromechanical resonators. J. Microelectromech. Syst. 12 (2003) 577-589
9. Lee J.E.-Y., Zhu Y., and Seshia A.A. Room temperature electrometry with SUB-10 electron resolution. J. Micromech. Microeng. February (2008) 025033
10. Cleland A.N., and Roukes M.L. A nanometer-scale mechanical electrometer. Nature 392 (1998) 160-162
11. Kroemmer H., Erbe A., Tilke A., Manus S., and Blick R.H. Nanomechanical resonators operating as charge detectors in the nonlinear regime. Europhys. Lett. 50 (2000) 101-106
12. Kenny T.W. Nanometer-scale force sensing with MEMS devices. IEEE Sens. J. 1 August (2) (2001) 148-156
13. Seshia A.A., Palaniapan M., Roessig T.A., Howe R.T., Gooch R.W., Schimert T.R., and Montague S. A vacuum packaged surface micromachined resonant accelerometer. J. Microelectromech. Syst. 11 (2002) 784-793
14. A.A. Seshia, R.T. Howe, S. Montague, An integrated microelectromechanical resonant output gyroscope, in: Proceedings of the 15th IEEE International Conference on Micro-Electro Mechanical Systems, Las Vegas, NV, January 21-25, 2002, pp. 722-726.
15. K.E. Wojciechowski, B.E. Boser, A.P. Pisano, A MEMS resonant strain sensor operated in air, in: Proceedings of the 17th IEEE International Conference Micro-Electro Mechanical Systems, Maastricht, 2004, pp. 841-845.
16. Bahreyni B., and Shafai C. A resonant micromachined magnetic field sensor. IEEE Sens. J. 7 September (9) (2007) 1326-1334
17. Pedersen C.B.W., and Seshia A.A. On the optimization of compliant force amplifier mechanisms for surface micromachnined resonant accelerometers. J. Micromech. Microeng. 14 July (4) (2004) 1281-1293
18. Su XP.S., and Yang H.S. Design of compliant microleverage mechanisms. Sens. Actuators A 87 July (2000) 146-156
19. Su S.X.P., Yang H.S., and Agogino A.M. A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology. IEEE Sens. J. 5 December (6) (2005) 1214-1222
20. Tang W.C., Lim M.G., and Howe R.T. Electrostatic comb drive levitation and control method. J. Microelectromech. Syst. 1 December (4) (1992) 170-178
21. Lee J., Zhu Y., and Seshia A.A. High Q bulk acoustic mode resonator operating in ambient pressure. Proceedings of the 18th Micro-Mechanics Europe Workshop. Guimaraes (2007) 293-296
22. Lee J.E.-Y., Zhu Y., and Seshia A.A. Bulk acoustic mode single-crystal silicon microresonator with high quality factor. J. Micromech. Microeng. 18 6 (2008) 064001
23. K.E. Wojciechowski, Electronics for resonant sensors, PhD thesis, University of California Berkeley, 2005.
24. Kim S.-J., Ono T., and Esashi M. Capacitive resonant mass sensor with frequency demodulation detection based on resonant circuit. Appl. Phys. Lett. 88 (2006) 053116
25. Ekinci K.L., Tang Y.T., and Roukes M.L. Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems. J. Appl. Phys. 95 (2004) 2682-2689
26. M.A. Hopcroft, Temperature-stabilized silicon resonators, PhD thesis, Stanford University, 2007.
27. Kim B., Chandler R., Hopcroft M.A., Agarwal M., Park W.-T., and Kenny T.W. Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators. Sens. Actuators A 137 May (1) (2007) 125-131