A bulk acoustic mode single-crystal silicon microresonator with a high-quality factor

Journal of Micromechanics and Microengineering

Volumn 18, Issue 6, 2008, Pages

  Lee, J E Y ^a   Zhu, Y ^a   Seshia, A A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTICS; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; RESONATORS; SILICON;

ACOUSTIC MODES; ANALYTICAL MODELS; CRYSTAL SILICONS; ELECTRICAL FEEDTHROUGH; ELECTRONIC IMPLEMENTATIONS; FOUNDRY SILICONS; MEMS PROCESSES; MOTIONAL RESISTANCES; QUALITY FACTORS; RAW MEASUREMENTS; RESONANT FREQUENCIES; RESONATOR PARAMETERS; SIMPLE METHODS; SQUARE PLATES; VOLTAGE BIASES;

LATTICE VIBRATIONS;

EID: 56549130565     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/6/064001     Document Type: Conference Paper

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