Electroless Ni-Mo-P diffusion barriers with Pd-activated self-assembled monolayer on SiO2

Materials Science and Engineering: B

Volumn 166, Issue 1, 2010, Pages 67-75

  Liu, Dian long ^a   Yang, Zhi gang ^a   Zhang, Chi ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Diffusion barrier; Electroless; Ni Mo P; Self assembled monolayer

Indexed keywords

AMORPHOUS FILMS; DIFFUSION BARRIERS; NICKEL ALLOYS; PALLADIUM ALLOYS; PALLADIUM COMPOUNDS; SILICA; X RAY PHOTOELECTRON SPECTROSCOPY;

CU INTERCONNECT; DIFFUSION BARRIER LAYERS; ELECTROLESS; ELECTROLESS NI; INTEGRATION APPLICATION; NI-MO-P; P-DIFFUSION; SIO 2 LAYER; SPUTTERED SEED LAYERS; ULTRALARGE SCALE INTEGRATION;

SELF ASSEMBLED MONOLAYERS;

EID: 70749089189     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2009.10.003     Document Type: Article

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