Microcrystalline to nanocrystalline silicon phase transition in hydrogenated silicon-carbon alloy films

Nanotechnology

Volumn 19, Issue 41, 2008, Pages

  Basa, D K ^a   Ambrosone, G ^b,c   Coscia, U ^b,d  

^a UTKAL UNIVERSITY   (India)

^b UNIVERSITY OF NAPLES FEDERICO II   (Italy)

^c INFM   (Italy)

^d Università degli Stud di Napoli Federico II   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOYS; CARBON; CARBON FILMS; HYDROGEN; HYDROGENATION; HYDROGENOLYSIS; METALLIC FILMS; METHANE; MICROCRYSTALLINE SILICON; NANOCRYSTALLINE ALLOYS; NANOCRYSTALLINE MATERIALS; NANOCRYSTALLINE SILICON; NANOSTRUCTURED MATERIALS; NONMETALS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILANES; SILICON; SILICON ALLOYS;

CARBON ALLOYS; CHEMICAL VAPOUR DEPOSITIONS; HYDROGENATED SILICONS; MEDIUM RANGES; METHANE GASSES; NANOCRYSTALLINE; PROTOCRYSTALLINE; RF POWERS; SMOOTH TRANSITIONS;

PHASE TRANSITIONS;

CARBON; NANOCRYSTAL; SILICON;

ARTICLE; CRYSTAL; FILM; HYDROGENATION; PHASE TRANSITION; PRIORITY JOURNAL; RAMAN SPECTROMETRY;

EID: 56349085969     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/41/415706     Document Type: Article

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