Fabrication and characterization of Si nanocrystals in SiC matrix produced by magnetron cosputtering

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 4, 2007, Pages 1327-1335

  Song, Dengyuan ^a   Cho, Eun Chel ^a   Conibeer, Gavin ^a   Cho, Young Hyun ^a   Huang, Yidan ^a   Huang, Shujuan ^a   Flynn, Chris ^a   Green, Martin A ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; OPTICAL BAND GAPS; SILICON CARBIDE; SILICON WAFERS; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON TARGET; SPUTTER TARGET; SPUTTERED AREA RATIO;

NANOCRYSTALS;

EID: 34547583590     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2756556     Document Type: Article

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