Structural characterization of annealed Si1-x Cx /SiC multilayers targeting formation of Si nanocrystals in a SiC matrix

Journal of Applied Physics

Volumn 103, Issue 8, 2008, Pages

  Song, Dengyuan ^a   Cho, Eun Chel ^a   Conibeer, Gavin ^a   Huang, Yidan ^a   Flynn, Chris ^a   Green, Martin A ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; NANOCRYSTALS; SILICON; SILICON CARBIDE;

ALTERNATING DEPOSITION; LAYERED STRUCTURAL STABILITY;

MULTILAYERS;

EID: 43049102043     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2909913     Document Type: Article

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