Study of a HPPMS discharge in Ar/O2 mixture: II. Plasma optical emission and deposited RuOx film properties

Plasma Sources Science and Technology

Volumn 18, Issue 4, 2009, Pages

  Benzeggouta, D ^a   Hugon, M C ^a   Bretagne, J ^a  

^a UNIVERSITÉ PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE TRANSFER; ELECTRIC DISCHARGES; IONIZATION OF GASES; LIGHT EMISSION; OPTICAL EMISSION SPECTROSCOPY; STOICHIOMETRY;

DIFFERENT PRESSURES; FILM STOICHIOMETRY; HIGH POWER PULSED MAGNETRON SPUTTERING; PENNING IONIZATION; PHYSICAL CHARACTERIZATION; SPUTTERED SPECIES; TIME RESOLVED OPTICAL EMISSION SPECTROSCOPY; TRANSITION REGIONS;

RUTHENIUM COMPOUNDS;

EID: 70350686478     PISSN: 09630252     EISSN: 13616595     Source Type: None    
DOI: 10.1088/0963-0252/18/4/045026     Document Type: Article

References (43)

1. Benzeggouta D, Hugon M C, Bretagne J and Ganciu M 2009 Plasma Sources Sci. Technol. 18 045025
2. Mozgrin D V, Fetisov I K and Khodachenko G V 1995 Plasma Phys. Rep. 21 400
3. Kouznetsov V, Macak K, Schneider J M, Helmersson U and Petrov I 1999 Surf. Coat. Technol. 122 290
4. Christie D J 2005 J. Vac. Sci. Technol. A 23 330
5. Vlcek J, Pajdarova A D and Musil J 2004 Contrib. Plasma Phys. 44 426
6. Ganciu M, Hecq M, Konstantinidis S, Dauchot J P, Bretagne J, de Poucques L and Touzeau M World Patent No WO 2005/090632
7. Vaina M, Meko M, Ganciu M, Bretagne J, Boisse-Laporte C, de Poucques L and Touzeau M 2005 Europhys. Lett. 72 390
8. Macak K, Kouznetsov V, Schneider J, Helmersson U and Petrov I 2000 J. Vac. Sci. Technol. 18 1533
9. Ehiasarian A P, New R, Munz W D, Hultman L, Helmersson U and Kouznetsov U 2002 Vacuum 65 147
10. Gudmundsson J T, Alami J and Helmersson U 2001 Appl. Phys. Lett. 78 3427
11. Gudmundsson J T, Alami J and Helmersson U 2002 Surf. Coat. Technol. 161 249
12. Imbert J C, de Poucques L, Boisse-Laporte C, Bretagne J, Hugon M C, Teule-Gay L, Touzeau M, Shtansky D and Voldoire O 2005 Surf. Coat. Technol. 200 717
13. Imbert J C, de Poucques L, Boisse-Laporte C, Bretagne J, Hugon M C, Pagnon D, Pitach P, Teulé-Gay L and Touzeau M 2008 Thin Solid films 516 4700
14. http://www.itrs.net/links/2006Update/Updatefinal.htm
15. Konstantinidis S, Dauchot J P and Hecq M 2006 Thin Solid Films 515 1182
16. Konstantinidis S, Hemberg A, Dauchot J P and Hecq M 2007 J Vac. Sci. Technol. B 25 L19
17. Sarakinos K, Alami J and Wuttig M 2007 J. Phy. D: Appl. Phys. 40 2108
18. Wallin E and Helmersson U 2008 Thin Solid Films 516 6398
19. Kubart T, Kappertz O, Nyberg T and Berg S 2006 Thin Solid Films 515 421 and references therein
20. Berg S, Blom H-O, Larsson T and Nender C 1987 J. Vac. Sci. Technol. A 5 202
21. Kadlec S, Musil J and Vyskocil J 1990 J. Vac. Sci. Technol. A 8 1560
22. Billard A and Frantz C 1993 Surf. Coat. Technol. 59 41
23. Debal F, Bretagne J, Dauchot J P, Hecq M and Wautelet M 2001 Plasma Sources Sci. Technol. 10 30
24. Touzeau M, Pagnon M and Bretagne M 1999 Vacuum 52 33-40
25. Debal F, Bretagne J, Jumet M, Wautelet M, Dauchot J P and Hecq M 1998 Plasma Sources Sci. Technol. 7 219
26. Ayguavives F, Aubert P, Ea-Kim M, Agius M and Bretagne J 1998 Appl. Phys.Lett. 73 1023
27. Depla D and de Gryse R 2001 Plasma Sources Sci. Technol. 10 547
28. Depla D, Haemers J and de Gryse R 2006 Thin Solid Films 515 416
29. Wiese W L, Smith M W and Miles B M 1969 Atomic Transition Probabilities NSRDS-NBS vol II (Washington, DC: National Bureau of Standards)
30. Moore C E 1976 Selected Tables of Atomic Spectra, Atomic Energy Levels and Multiplet Tables O I NSRDS-NBS vol III (Washington, DC: National Bureau of Standards)
31. http://physics.nist.gov/PhysRefData/Handbook/Tables/rutheniumtable3.htm
32. Moore C E 1971 Atomic energy levels as derived from the analyses of optical spectra 3 NSRDS-NBS vol III (Washington, DC: National Bureau of Standards) 42 Moto 57La; 72Hf to 89Ac
33. Guimares F and Bretagne J 1993 Plasma Sources Sci. Technol. 2 127
34. Trennepohl W Jr, Bretagne J, Gousset G, Pagnon D and Touzeau M 1996 Plasma Source Sci. Technol. 5 607
35. Vasina P, Mesko M, Imbert J C, Ganciu M, Boisse-Laporte C, de Poucques L, Touzeau M, Pagnon D and Bretagne J 2007 Plasma Sources Sci. Technol. 16 501
36. Vasina P, Mesko M, de Poucques L, Bretagne J, Boisse-Laporte C and Touzeau M 2008 Plasma Sources Sci. Technol. 17 035007
37. Steers E B M 1997 J Anal. At. Spectrom. 12 1033
38. de Poucques L, Imbert J-C, Boisse-Laporte C, Bretagne J, Ganciu M, Teulé-Gay L, Vaina P and Touzeau M 2007 Plasma Process. Polym. 4 S424
39. Rossnagel S M and Kaufman J 1988 J Vac. Sci. Technol. A 6 223
40. Kadlec S 2007 Plasma Process. Polym. 4 S419
41. Bretagne J, Callede G, Godart J L and Puech V 1986 J. Phys. D: Appl. Phys. 19 761
42. Piper L G, Clyne M A A and Monkhouse P B 1982 J. Chem. Soc., Faraday Trans. 78 1373
43. Guimares F, Almeida J B and Bretagne J 1991 J. Vac. Sci. Technol. A 9 133