Experimental study of a pre-ionized high power pulsed magnetron discharge

Plasma Sources Science and Technology

Volumn 16, Issue 3, 2007, Pages 501-510

  Vaina, P ^a,c   Meko, M ^a,c   Imbert, J C ^a   Ganciu, M ^a,b   Boisse Laporte, C ^a   De Poucques, L ^a   Touzeau, M ^a   Pagnon, D ^a   Bretagne, J ^a  

^a UNIVERSITÉ PARIS SUD   (France)

^b National Institute of Laser Plasma and Radiations Physics   (Romania)

^c MASARYK UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC CURRENT CONTROL; IONIZATION; MAGNETRON SPUTTERING; OPTICAL EMISSION SPECTROSCOPY;

DISCHARGE CURRENT; LOW CURRENT PRE-IONIZATION; POWER PULSED MAGNETRON DISCHARGE;

ELECTRIC DISCHARGES;

EID: 34547734614     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/3/009     Document Type: Article

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