Experimental study of a radio-frequency Ionized Physical Vapour Deposition process: Contamination by the internal coil

Thin Solid Films

Volumn 516, Issue 15, 2008, Pages 4700-4708

  Imbert, J C ^a   de Poucques, L ^a   Boisse Laporte, C ^a   Bretagne, J ^a   Hugon, M C ^a   Pagnon, D ^a   Pitach, P ^a   Teule Gay L ^a   Touzeau, M ^a  

^a UNIVERSITÉ PARIS SUD   (France)

Author keywords

Contamination; IPVD; Radio frequency; Thin film deposition

Indexed keywords

CONTAMINATION; IONIZATION; MAGNETRON SPUTTERING; NATURAL FREQUENCIES; STAINLESS STEEL;

INTERNAL COIL; MAGNETRON MATERIALS; THIN FILM DEPOSITION;

PHYSICAL VAPOR DEPOSITION;

EID: 42649124955     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.08.119     Document Type: Article

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